Abstract
Although the sol-gel method is ideally suited for the preparation of ferroelectric PZT thin films, poor reproducibility and the need to lower crystallization temperatures remain an issue. To address these problems, we have studied the mechanism of thin film formation using absorption-reflection infrared spectroscopy for a novel and less harmful precursor solution system based on butoxyethanol. By recording in situ infrared spectra we were able to monitor hydrolysis, condensation, decomposition and crystallization phenomena versus temperature. We speculate that the lower reactivity of butoxyethanol is responsible for the higher quality of Ti rich PZT based ferroelectric capacitors prepared by a butoxyethanol precursor solution compared with the more widely used methoxyethanol one. Finally, we observed that film's decomposition kinetics is faster as compared to bulk samples and depends on film thickness and electrode layer.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
R.W. Schwartz, J.A. Voigt, B.A. Tuttle, D.A. Payne, T.L. Reichert, and R.S. DaSalla, J. Mater. Res. 12(2), 444 (1997).
P.R. Coffman and S.K Dey, J. Sol-Gel Science and Technology 1, 251 (1994).
P.R. Coffman, C.K. Barlingay, A. Gupta, and S.K Dey, J. Sol-Gel Science and Technology 6, 83 (1996).
R. Nouwen, J. Mullens, D Franco, J. Yperman, and L.C. Van Poucke Vibrational. Spectroscopy 10, 291 (1996).
B. Elvers and H. Hofmann, Ullmann's Encyclopedia of Industrial Chemistry B5 (VCH Weinheim, 1994), p. 455.
W. Zhu, Z.Q. Liu, M.S. Tse, and H.S. Tan, J. Mater. Sci. 6, 369 (1995).
K. Nakamoto, Infrared and Raman Spectra of Inorganic and Coordination Compounds (John Wiley & Sons, 1997).
P. Baraldi, Spectrochimica Acta 38(1), 51 (1982).
C.D.E. Lakeman, Z. Xu, and D.A. Payne, Proc. 9th IEEE Intern. Symp. on Applications of Ferroelectrics (NewYork, USA, 1994) p. 404.
K.D. Budd, S.K Dey, and D.A. Payne, Br. Cer. Proc. 36, 107 (1985).
D.J. Wouters, G. Norga, and H.E. Maes, Mat. Res. Soc. Symp. Proc. 541, 381 (1999).
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Fè, L., Norga, G., Wouters, D.J. et al. Absorption-Reflection Infrared Spectroscopy Studies of Sol-Gel Prepared Ferroelectric Pb(Zr,Ti)O3 Thin Films on Pt Electrodes. Journal of Sol-Gel Science and Technology 19, 149–152 (2000). https://doi.org/10.1023/A:1008707531737
Issue Date:
DOI: https://doi.org/10.1023/A:1008707531737