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Preparation and Characterization of (Ba,Ca)(Ti,Zr)O3 Thin Films Through Sol-Gel Processing

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Abstract

(Ba0.92,Ca0.08)(Ti0.92,Zr0.08)O3 thin films were prepared from Ba-Ti and Ca-Zr precursors by sol-gel processing. Polymerizable solutions containing Ba-Ti and Ca-Zr, respectively, were newly synthesized. Decomposition of the starting compounds and crystallization behavior of the film were examined by using TG/DTA and XRD. Microstructure of thin films was observed by using SEM. Polycrystalline (Ba0.92,Ca0.08)(Ti0.92, Zr0.08)O3 films obtained by firing at 800°C were dense with fine grains. The thin films showed a dielectric constant of 1200 and dielectric loss of 0.5%.

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References

  1. N.D.S. Mohallem and M.A. Aegerter, Proceedings of MRS Spring Meeting, Better Ceramics Through Chemistry III. 21, 515 (1988).

    Google Scholar 

  2. M.N. Kamalasanan, S. Chandra, P.C. Joshi, and A. Mansingh, Appl. Phys. Lett. 59(27), 3547 (1991).

    Google Scholar 

  3. K.A. Vorotilov, E.V. Orlova, V.I. Petrovsky, M.I. Yanovskaja, S.A. Ivanov, E.P. Turevskaya, and N. Ya. Turova, Ferroelectrics 123, 261 (1991).

    Google Scholar 

  4. Z. Xu, H.K. Chae, M.H. Frey, and D.A. Payne, Proceedings of MRS Spring Meeting, Better Ceramics Through Chemistry V. 271, 339 (1992).

    Google Scholar 

  5. Y. Xuand and J.D. Mackenzie, Integrated Ferroelectrics 1, 17 (1992).

    Google Scholar 

  6. M. McQuarrie, J. Am. Ceram. Soc. 38(12), 444 (1955).

    Google Scholar 

  7. T. Nomura, N. Kawano, J. Yamamatsu, T. Arashi, Y. Nakano, and A. Sato, Jpn. J. Appl. Phys. 34, 5389 (1995).

    Google Scholar 

  8. J.R. Slack and J.C. Burfoot, J. Phys. C: Solid St. Phys. 4, 898 (1971).

    Google Scholar 

  9. S.B. Desu, C.H. Peng, L, Kammerdiner, and P.J. Schuele, Mat. Res. Symp. Proc. 200, 319 (1990).

    Google Scholar 

  10. T. Nakagawa, J. Yamaguchi, T. Usuki, Y. Matsui, M. Okuyama, and Y. Hamakawa, Jpn. J. Appl. Phys. 18(5), 897 (1979).

    Google Scholar 

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Authors and Affiliations

  1. Chemistry and Biology Engineering, Fukui National College of Technology, Geshi, Sabae, Fukui, 916-8507, Japan

    Masahiro Toyoda & Muhamm Yusuf Sahriza Lubis

Authors
  1. Masahiro Toyoda
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  2. Muhamm Yusuf Sahriza Lubis
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Correspondence to Masahiro Toyoda.

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Toyoda, M., Lubis, M.Y.S. Preparation and Characterization of (Ba,Ca)(Ti,Zr)O3 Thin Films Through Sol-Gel Processing. Journal of Sol-Gel Science and Technology 16, 7–12 (1999). https://doi.org/10.1023/A:1008700802301

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  • DOI: https://doi.org/10.1023/A:1008700802301

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