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Chemical Surface Coating: Synthesis and Characterization of a Silicon Oxynitride Coated Silica Sel

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Interface Science

Abstract

Mesoporous silica gel has been coated with a thin silicon oxynitridefilm via chemical surface coating. In the first part of the synthesis, achemically bound preceramic polysilazane coating is formed layer by layer onthe pore walls at low temperature, using SiCl4 andNH3 as reagents. In the second part of the synthesis, thepolysilazane coated silica gel is pyrolysed, yielding a chemically bound,thin oxynitride coating.

During the synthesis, the evolution of the chemical and morphologicalcomposition has been investigated with several elemental and spectroscopicanalysis techniques as well as with nitrogen porosimetry.

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Authors and Affiliations

  1. Laboratory of Inorganic Chemistry, Department of Chemistry, University of Antwerpen (uia), Universiteitsplein 1, B-2610, Wilrijk, Belgium

    Nathalie R.E.N. Impens & Etienne F. Vansant

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  1. Nathalie R.E.N. Impens
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  2. Etienne F. Vansant
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Impens, N.R., Vansant, E.F. Chemical Surface Coating: Synthesis and Characterization of a Silicon Oxynitride Coated Silica Sel. Interface Science 5, 95–101 (1997). https://doi.org/10.1023/A:1008692707123

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