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A High Temperature Micropower Capacitive Pressure Sensor Interface Circuit

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Abstract

A pressure sensor interface circuit featuring micropower consumptionis presented. The sensitivity to leakage currents has been reduced, allowingoperation at high temperature. Special attention has been paid to minimisealiasing in the sampled interface. An optimal combination of contradictoryrequirements on power consumption, temperature range and sampling speed wasobtained by a very careful system design and optimisation. The circuitconverts a sensor capacitance variation of ±5pF into an 11 bit outputword at a 2Hz rate. This resolution is guaranteed in the −40°C to100°C temperature range. It may slowly decay above 100°C but ensuresat least 5 bit at 130°C. The power consumption at room temperature issmaller than 2µA from a 2.4V to 4V battery.

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References

  1. T. Smith, M. Chevroulet, B. De Geeter, and J.-P. Bardyn, “Low power intelligent sensing systems,” in Proceedings of Sensors Expo 95, Boston, USA, 1995, pp. 298–302.

  2. R. Puers, “Capacitive sensors, when and how to use them,” Sensors and Actuators A 37–38, pp. 93–105, 1993.

    Google Scholar 

  3. M. Pierre, B. Steenis, J. Hermann, J.-P. Bardyn, V. Nouazé, and D. Dominguez, “A battery operated microsystem for flow measurements,” Digest of Technical Papers of Transducers 95, Stockholm, Sweden, 1995, pp. 544–547.

  4. M. Schmidt, E. Spiegel, H. Dudaicevs, Y. Manoli, and W. Mokwa, “Readout electronics for wide temperature range with integrated surface micromachined capacitive pressure sensor,” in Proc. of 21st ESSCIRC, Lille, France, 1995, pp. 230–233.

  5. O. Nys, and E. Dijkstra, “On configurable A/D converters,” IEEE Journal of Solid State Circuit SC-28, pp. 736–742, 1993.

    Google Scholar 

  6. H. de Lambilly, Ph. Renaud, and F. Rudolf, “Low-cost stress-free mounting of a capacitive pressure sensor,” Eurosensors VIII, European Conference on Solid-State Transducers, Toulouse, France, 1994.

  7. O. Nys, R. Henderson, and E. Dijkstra, “Low power high resolution data converters,” in Proceedings of Midwest Symposium on Circuits and Systems, Rio de Janeiro, Brazil, 1995.

  8. E. Vittoz, “Micropowertechniques,” in Design of VLSI Circuits for Telecommunication and Signal Processing, J. E. Franca and Y. P. Tsividis, (eds.) chapter 5, Prentice Hall, USA, pp. 53–97, 1994.

    Google Scholar 

  9. A. Bakker, and J. H. Huijsing, “Micropower CMOS Smart Temperature Sensor,” in Proc. of 21st ESSCIRC, Lille, France, pp. 238–241, 1995.

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Geeter, B.D., Nys, O. & Bardyn, JP. A High Temperature Micropower Capacitive Pressure Sensor Interface Circuit. Analog Integrated Circuits and Signal Processing 14, 179–191 (1997). https://doi.org/10.1023/A:1008285818028

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  • DOI: https://doi.org/10.1023/A:1008285818028

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