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Atmospheric pressure chemical vapor deposition of undoped zinc oxide films from a zinc amide precursor

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Suh, S., Mîinea, L.A., Hoffman, D.M. et al. Atmospheric pressure chemical vapor deposition of undoped zinc oxide films from a zinc amide precursor. Journal of Materials Science Letters 20, 115–118 (2001). https://doi.org/10.1023/A:1006777915520

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