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Crystallization-induced stress in tungsten nitride thin films

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Journal of Materials Science Letters

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Authors and Affiliations

  1. Centre for Advanced Materials Technology (CAMT), Department of Mechanical and Mechatronic Engineering, University of Sydney, NSW, 2006, Australia

    Y. G. Shen

  2. Centre for Advanced Materials Technology (CAMT), Department of Mechanical and Mechatronic Engineering, University of Sydney, NSW, 2006, Australia

    Y. W. Mai

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  1. Y. G. Shen
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  2. Y. W. Mai
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Shen, Y.G., Mai, Y.W. Crystallization-induced stress in tungsten nitride thin films. Journal of Materials Science Letters 19, 1941–1943 (2000). https://doi.org/10.1023/A:1006775821012

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