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Stress analysis of B doped silicon bridges and cantilever structures by Raman spectroscopy

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Journal of Materials Science Letters

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References

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Authors and Affiliations

  1. Department of Chemical and Life Sciences, University of Northumbria at Newcastle, Ellison Place, Newcastle upon Tyne, NEl 8ST, UK

    M. A. Lourenço, D. J. Gardiner & M. Bowden

  2. School of Engineering, University of Durham, South Road, Durham, DH1 3LE, UK

    J. Hedley & D. Wood

Authors
  1. M. A. Lourenço
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  2. D. J. Gardiner
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  3. M. Bowden
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  4. J. Hedley
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  5. D. Wood
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Lourenço, M.A., Gardiner, D.J., Bowden, M. et al. Stress analysis of B doped silicon bridges and cantilever structures by Raman spectroscopy. Journal of Materials Science Letters 19, 767–769 (2000). https://doi.org/10.1023/A:1006752321075

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  • DOI: https://doi.org/10.1023/A:1006752321075

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