Skip to main content
SpringerLink
Log in

Young's modulus measurement of nickel silicide film on crystal silicon by a surface profiler

  • Published:
Journal of Materials Science Letters

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

References

  1. B. LI, B. XIONG, L. JIANG, Y. ZOHAR and M. WONG, in Proceedings, IEEE, The Twelfth Annual InternationalWorkshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems, USA (1999) p. 638.

  2. G. KROTZ, W. LEGNER, CH. WAGNER, H. MOLLER, H. SONNTAG and G. MULLER, in The 8th International Conference on Solid-state Sensors and Actuators, and Eurosensors IX, Stockholm, Sweden (1995) p. 186.

  3. V. LEHMANN, in Proceedings, IEEE, The Ninth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems, New York, NY, USA (1996) p. 1.

  4. R. MUKAI, S. OZAWA and H. YAGI, Thin Solid Films 270 (1995) 567.

    Google Scholar 

  5. J. CHEN, J. P. COLINGE, D. FLANDRE, R. GILLON, J. P. RASKIN and D. VANHOENACKER, J. Electrochem. Soc. 144(7) (1997) 2437.

    Google Scholar 

  6. C. H. HO, M. C. POON, F. DENG, J. K. O. SIN and S. S. LAU, to be published.

  7. F. DENG, K. RING, Z. F. GUAN, S. S. LAU, W. B. DUBBELDAY, N. WANG and K. K. FUNG, J. Appl. Phys. 81(12) (1997) 1.

    Google Scholar 

  8. A. S. KORHONEN, P. L. JONES and F. H. COCKS, Materials Science and Engineering 49 (1981) 127.

    Google Scholar 

  9. S. P. MURARKA and T. F. RETAJCZYK, JR., J. Appl. Phys. 54(4) (1983) 2069.

    Google Scholar 

  10. O. TABATA, K. KAWAHATA, S. SUGIYAMA and I. IGARASHI, in Proceedings of IEEE Micro Electro Mechanical Systems, Salt Lake City, Utah (1989) p. 152.

  11. M. W. PUTTY, S. C. CHANG, R. T. HOWE, A. L. ROBINSON and K. D. WISE, ibid. p. 60.

  12. Y. C. TAI and R. S. MULLER, in Proceedings IEEE Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots, NY, USA (1990) p. 147.

  13. W. N. SHARPE, JR., S. BROWN, G. C. JOHNSON and W. KNAUSS, MRS, Symposium Proceedings, 518 (1998) 57.

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Microelectronics Center, Southeast University, Nanjing, 210096, People's Republic of China

    Ming Qin

  2. Department of Electrical and Electronic Engineering, Hong Kong University of Science and Technology, Kowloon, Hong Kong

    Vincent M. C. Poon

Authors
  1. Ming Qin
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Vincent M. C. Poon
    View author publications

    You can also search for this author in PubMed Google Scholar

Rights and permissions

Reprints and permissions

About this article

Cite this article

Qin, M., Poon, V.M.C. Young's modulus measurement of nickel silicide film on crystal silicon by a surface profiler. Journal of Materials Science Letters 19, 2243–2245 (2000). https://doi.org/10.1023/A:1006729009092

Download citation

  • Issue Date:

  • DOI: https://doi.org/10.1023/A:1006729009092

Keywords

Search

Navigation