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Formation of Si nano-structures by O2 flow during deposition

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Journal of Materials Science Letters

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Authors and Affiliations

  1. Department of Electronic Engineering, Sun Moon University, Asan, 336-840, Republic of Korea

    Kyoung-Hwan Koo

  2. Department of Electronic Engineering, Sun Moon University, Asan, 336-840, Republic of Korea

    Hyoung Gin Nam

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  1. Kyoung-Hwan Koo
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  2. Hyoung Gin Nam
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Koo, KH., Nam, H.G. Formation of Si nano-structures by O2 flow during deposition. Journal of Materials Science Letters 19, 947–949 (2000). https://doi.org/10.1023/A:1006708003291

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