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Effects of Grain Orientation on Preferred Abnormal Grain Growth in Copper Films on Silicon Substrates

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Journal of Materials Science Letters

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References

  1. G. H. Takaoka, J. Ishikawaand T. Takagi, J. Vac. Sic. Technol. A8(1990) 840.

    Google Scholar 

  2. T. Ohmi, T. Saito, T. Shibataand T. Nitta, Appl. Phys. Lett. 52(1988) 2236.

    Google Scholar 

  3. P. A. Flinn, J. Mater. Res. 6(1991) 1498.

    Google Scholar 

  4. P. Chaudhari, J. Appl. Phys. 45(1974) 4339.

    Google Scholar 

  5. R. P. Vinci, T. N. Marieband J. C. Bravman, Mater. Res. Soc. Symp. Proc. 308(1993) 297.

    Google Scholar 

  6. P. BØrgensen, J. K. Lee, R. Gleixnerand C. Y. Li, Appl. Phys. Lett. 60(1992) 1706.

    Google Scholar 

  7. F. W. Young, J. V. Cathcartand A. T. Gwathmey, Acta Metal. Metal. 4(1956) 145.

    Google Scholar 

  8. A. F. Burnettand J. M. Cech, J. Vac. Sci. Technol. A11(1993) 2970.

    Google Scholar 

  9. T. Ohmi, T. Saito, M. Otsukiand T. Shibata, J. Electrochem. Soc. 138(1991) 1089.

    Google Scholar 

  10. D. P. Tracyand D. B. Knorr J. Elec. Mater. 22(1993) 611.

    Google Scholar 

  11. S. P. Murarka, Mater. Sci. Engng R19 (1997) 87.

    Google Scholar 

  12. W. D. Nix, Metall. Trans. A 22A (1989) 2217.

    Google Scholar 

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Zhang, J., Xu, K. & He, J. Effects of Grain Orientation on Preferred Abnormal Grain Growth in Copper Films on Silicon Substrates. Journal of Materials Science Letters 18, 471–473 (1999). https://doi.org/10.1023/A:1006694414907

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