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Intrinsic Hydrogenated Microcrystalline Silicon Oxide Films Prepared by RF Glow Discharge

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Journal of Materials Science Letters

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Authors and Affiliations

  1. Energy Research Unit, Indian Association for the Cultivation of Science, Jadavpur, Calcutta, 700 032, India

    D. Das

  2. Energy Research Unit, Indian Association for the Cultivation of Science, Jadavpur, Calcutta, 700 032, India

    S. Mandal & A. K. Barua

Authors
  1. D. Das
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  2. S. Mandal
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  3. A. K. Barua
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Das, D., Mandal, S. & Barua, A.K. Intrinsic Hydrogenated Microcrystalline Silicon Oxide Films Prepared by RF Glow Discharge. Journal of Materials Science Letters 17, 2097–2100 (1998). https://doi.org/10.1023/A:1006688218232

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