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Evaluation of silicon nitride and silicon carbide as efficient polysilicon grain-growth inhibitors

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Journal of Materials Science Letters

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Authors
  1. C. L. Cha
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  2. E. F. Chor
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  3. Y. M. Jia
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  4. A. J. Bourdillon
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  5. H. Gong
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  6. J. S. Pan
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  7. A. Q. Zhang
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  8. S. K. Tang
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  9. C. B. Boothroyd
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Cha, C.L., Chor, E.F., Jia, Y.M. et al. Evaluation of silicon nitride and silicon carbide as efficient polysilicon grain-growth inhibitors. Journal of Materials Science Letters 18, 1427–1431 (1999). https://doi.org/10.1023/A:1006679625601

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  • DOI: https://doi.org/10.1023/A:1006679625601

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