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X-ray Photoelectron Spectroscopy of Sputter-Deposited Fluorocarbon Films

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Journal of Materials Science Letters

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Authors and Affiliations

  1. Department of Human and Mechanical Systems Engineering, Faculty of Engineering, Kanazawa University, 2-40-20 Kodatsuno, Kanazawa, 920, Japan

    Y. Yamada, T. Kurobe, K. Yagawa & K. Ikeda

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  1. Y. Yamada
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  2. T. Kurobe
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  3. K. Yagawa
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  4. K. Ikeda
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Yamada, Y., Kurobe, T., Yagawa, K. et al. X-ray Photoelectron Spectroscopy of Sputter-Deposited Fluorocarbon Films. Journal of Materials Science Letters 18, 415–417 (1999). https://doi.org/10.1023/A:1006661507638

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  • DOI: https://doi.org/10.1023/A:1006661507638

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