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Tantalum oxide films prepared by unbalanced reactive magnetron sputtering

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Journal of Materials Science Letters

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Authors and Affiliations

  1. Department of Physics, Bangalore University, Jnanabharathi, Bangalore, India

    N. Rama Rao & R. Chandramani

  2. Department of Instrumentation, Indian Institute of Science, Bangalore

    G. Mohan Rao

Authors
  1. N. Rama Rao
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  2. R. Chandramani
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  3. G. Mohan Rao
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Rao, N.R., Chandramani, R. & Rao, G.M. Tantalum oxide films prepared by unbalanced reactive magnetron sputtering. Journal of Materials Science Letters 18, 1949–1951 (1999). https://doi.org/10.1023/A:1006653803592

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