Skip to main content
Log in

Fluorine Doping in Transparent Conductive ZnO Thin Films by a Sol-gel Method Using Trifluoroacetic Acid

  • Published:
Journal of Materials Science Letters

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

References

  1. R. E. I. Schropp and A. Madan, J. Appl. Phys. 66 (1989) 2027.

    Google Scholar 

  2. Y. Igasaki and H. Saito, ibid. 70 (1991) 3613

    Google Scholar 

  3. J. Hu and R. G. Gordon, Solar Cells 30 (1991) 437.

    Google Scholar 

  4. Idem., J. Electrochem. Soc. 139 (1992) 2014.

    Google Scholar 

  5. Idem., J Appl. Phys. 71 (1992) 880.

    Google Scholar 

  6. Idem., ibid. 72 (1992) 5381.

  7. A. Sarkar, S. Ghosh, S. Chaudhuri and A. K. Pal, Thin Solid Films 204 (1991) 255.

    Google Scholar 

  8. J. Hu and R. G. Gordon, Mater. Res. Soc. Symp. Proc. 202 (1991) 457.

    Google Scholar 

  9. T. Tsuchiya, T. Emoto and T. Sei, J. Non-Cryst. Solids 178 (1994) 327.

    Google Scholar 

  10. M. Ohyama, H. Kozuka, T. Yoko and S. Sakka, J. Ceram. Soc. Jpn. 104 (1996) 296.

    Google Scholar 

  11. M. N. Kamalasanan and S. Chandra, Thin Solid Films 288 (1996) 112.

    Google Scholar 

  12. S. Fujihara, T. Kimura, Y. Masuda, J.-S. Jin and K. Tanabe, in Proceedings of the Ninth International Symposium on Superconductivity, Sapporo, October 1996 (Springer, Tokyo, 1997) p. 441.

    Google Scholar 

  13. S. Fujihara, M. Tada and T. Kimura, Thin Solid Films 304 (1997) 252.

    Google Scholar 

  14. S.-C. Chang, J. Vac. Sci. Technol. 17 (1980) 366.

    Google Scholar 

Download references

Authors

Rights and permissions

Reprints and permissions

About this article

Cite this article

Fujihara, S., Kusakado, J. & Kimura, T. Fluorine Doping in Transparent Conductive ZnO Thin Films by a Sol-gel Method Using Trifluoroacetic Acid. Journal of Materials Science Letters 17, 781–783 (1998). https://doi.org/10.1023/A:1006647919562

Download citation

  • Issue Date:

  • DOI: https://doi.org/10.1023/A:1006647919562

Keywords

Navigation