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Effects of Density of Gas Flow Rate on Large Area Diamond Growth in Hot Filament Chemical Vapor Deposition

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Journal of Materials Science Letters

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References

  1. F. G. Celii, P. E. Pehrsson, H.-T. Wang and J. E. Butler, Appl. Phys. Lett. 52 (1988) 203.

    Google Scholar 

  2. S. J. Harris, A. M. Weiner and T. A. Perry, ibid. 53 (1988) 1605.

    Google Scholar 

  3. Y. Matsui and M. Sehera, Jpn. J. Appl. Phys. 28 (1989) 1023.

    Google Scholar 

  4. H. Rau and F. Picht, J. Mater. Res. 7 (1992) 934.

    Google Scholar 

  5. Dae-Weon Kweon, Jai-Young Lee and Dongho Kim, J. Appl. Phys. 69 (1991) 8329.

    Google Scholar 

  6. T. Debroy, K. Tankala, W. A. Yarbrough and R. Messier, ibid. 68 (1990) 2424.

    Google Scholar 

  7. C.-P. Klages, Appl. Phys. A 56/6 (1994) 513.

    Google Scholar 

  8. C. F. Chen, Y. C. Huang, S. Hosomi and I. Yoshida, Hyomen Gijutsu 40 (1989) 301.

    Google Scholar 

  9. K. Karihara, K. Sasaki, M. Kawarada and N. Koshina, Appl. Phys. Lett. 52 (1988) 437.

    Google Scholar 

  10. S. Matsumoto, M. Kamo and T. Kobayashi, ibid. 22 (1987) 737.

    Google Scholar 

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Yu, J. Effects of Density of Gas Flow Rate on Large Area Diamond Growth in Hot Filament Chemical Vapor Deposition. Journal of Materials Science Letters 17, 1011–1013 (1998). https://doi.org/10.1023/A:1006626404000

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