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Analysis of Constituents Generated With Laser Machining of Si3N4 and SiC

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Journal of Materials Science Letters

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References

  1. W. Kanematsu, S. Sakai, M. Ito, Y. Yamauchi, T. Ohji and S. Ito, J. Ceram. Soc. Jpn. 94 (1986) 671.

    Google Scholar 

  2. J. Yamamoto and Y. Yamamoto, in Proceedings of LAMP'87 OSAKA, (1987) 297.

  3. I. Shigematsu, M. Nakamura, K. Kanayama and Y. Hirai, J. High Temp. Soc. Jpn. 18 (1992) 36.

    Google Scholar 

  4. I. Shigematsu, M. Nakamura, K. Kanayama and Y. Hirai, J. Ceram. Soc. Jpn. International edition, 101 (1993) 591.

    Google Scholar 

  5. I. Shigematsu, M. Nakamura, K. Kanayama and K. Saito, Rev. Laser Eng. 22 (1994) 899.

    Google Scholar 

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Authors
  1. Ichinori Shigematsu
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  2. Kouzou Kanayama
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  3. Akira Tsuge
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  4. Mamoru Nakamura
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Shigematsu, I., Kanayama, K., Tsuge, A. et al. Analysis of Constituents Generated With Laser Machining of Si3N4 and SiC. Journal of Materials Science Letters 17, 737–739 (1998). https://doi.org/10.1023/A:1006606810476

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  • DOI: https://doi.org/10.1023/A:1006606810476

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