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The effects of oxygen partial pressure on (Ba, Sr)TiO3 thin films deposited on RuO2 bottom electrodes

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Authors and Affiliations

  1. Department of Materials Engineering, Hanyang University, 17 Haengdang-dong, Seongdong-gu, Seoul, South Korea

    SU-HYON PAEK, KONG-SOO LEE & JIN-YONG SUNG

  2. Department of Inorganic Materials Engineering, Hanyang University, Haengdang-dong, Seongdong-gu, Seoul, South Korea

    SEUNG-YONG SON

  3. Department of Electronic Engineering, Hanseo University, 360 Daegok-ri, Haemi-myun, Seosan-gun, Chung-Nam, South Korea

    CHI-SUN PARK

  4. Samsung Electronic, Kihung-eup, Kyungki-do, South Korea

    JU-HYUCK CHUNG

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  1. SU-HYON PAEK
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  2. KONG-SOO LEE
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  3. JIN-YONG SUNG
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  4. SEUNG-YONG SON
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  5. CHI-SUN PARK
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PAEK, SH., LEE, KS., SUNG, JY. et al. The effects of oxygen partial pressure on (Ba, Sr)TiO3 thin films deposited on RuO2 bottom electrodes. Journal of Materials Science Letters 17, 95–98 (1998). https://doi.org/10.1023/A:1006518429998

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