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BaTiO3 thin film prepared by coating-pyrolysis process on Nb-doped SrTiO3 substrate

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Abstract

Epitaxial BaTiO3 thin film was prepared on Nb-doped SrTiO3 substrate by coating-pyrolysis process using a mixed solution of barium and titanium naphthenates. The amorphous film pyrolyzed at 470 °C was crystallized with high orientation after heat-treatment at 850 °C under low oxygen partial pressure. X-ray diffraction Θ/2Θ and β scans indicated that the BaTiO3 film was epitaxial relationship with Nb-doped SrTiO3 substrate. The dielectric constant was approximately 230 at 103 Hz and was monotonically decreased with increasing of frequency at room temperature.

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Kim, S., Kwon, OY. BaTiO3 thin film prepared by coating-pyrolysis process on Nb-doped SrTiO3 substrate. Journal of Materials Science 34, 707–709 (1999). https://doi.org/10.1023/A:1004556409723

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