Abstract
Ultrafine nanosized powders of TiO2 and TiN have been synthesized by the reactive ion-beam evaporation technique. In an oxygen or nitrogen atmosphere (1–10 Torr), a high-power-density ion beam (about 0.4 GW cm-2) is focused onto a Ti target; as a result of the interaction between ablated particles and gas, fine and ultrafine powders are synthesized. The influence of gas pressure and target–collector distance on the particle composition, size distribution and shape have been studied. At longer target–collector distances and higher pressures, powders in the 4–45 nm range are collected while, at shorter distances and lower pressures, the powders are in the micrometre range. TiO2 particles are spherical in shape, while TiN particles are cubic.
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Nakagawa, Y., Grigoriu, C., Masugata, K. et al. Synthesis of TiO2 and TiN nanosize powders by intense light ion-beam evaporation. Journal of Materials Science 33, 529–533 (1998). https://doi.org/10.1023/A:1004360905931
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DOI: https://doi.org/10.1023/A:1004360905931