Abstract
This paper describes the pulsed constant current anodization of n+ and p+-GaAs in ethylene glycol–water–tartaric acid (AGW) mixture, up to 17mAcm−2. A 0.26μm thick film is obtained for a final voltage of 135V at 4.3mAcm−2 pulsed current density. Cyclic voltammetry showed that the initial growth of a monolayer anodic oxide can be described by a charge transfer with uncompensated cell resistance model. The relationship between peak current, peak voltage and scan rate has been verified for this process, based on the above model.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
H. Hasegawa and H. L. Hartnagel, J. Electrochem. Soc., 123 (1976) 713.
M. J. Grove, D. A. Hudson and P. S. Zory, R. J. Dalby, C. M. Harding and A. Rosenberg, J. Appl. Phys., 76 (1994) 587.
C. C. Largent, M. J. Grove, P. S. Zory, H. K. Choi and G. W. Turner, Proceedings of the SPIE Conference on ‘Lasers and Applications’, Photonics West ‘95, SPIE vol. 2382, pp. 244–49.
C. W. Fischer and S. W. Teare, J. Appl. Phys., 67(5), (1990) 2608.
A. J. Calandra, N. R. de Tacconi, R. Pereiro and A. J. Arvia, Electrochim. Acta 19 (1974) 901.
A. Yamamoto and S. Yano, J. Electrochem. Soc. 122 (1975) 260.
J. P. S. Pringle, Electrochim. Acta 25 (1980) 1423.
N. R. de Tacconi, A. J. Calandra and A. J. Arvia, ibid. 18 (1973) 571.
S. Srinivasan and E. Gileadi, ibid. 11 (1966) 321.
D. Meissner and R. Memming, ibid. 37 (1992) 799.
P. Blood, Semicond. Sci. Technol. 1 (1986) 7.
S. Szpak, J. Electrochem. Soc. 124 (1977) 107.
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Buda, M., Cengher, D., Diaconescu, D. et al. Anodization of n and p-GaAs in ethylene glycol–water–tartaric acid mixture. Journal of Applied Electrochemistry 28, 745–749 (1998). https://doi.org/10.1023/A:1003254429884
Issue Date:
DOI: https://doi.org/10.1023/A:1003254429884