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Flame Emission Spectra in the Region 400–600 nm during Low-Pressure Silane and Dichlorosilane Oxidation

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Abstract

The flame emission in the region 400–600 nm during monosilane and dichlorosilane oxidation (initial pressures of 3–20 torr; T = 300 K) is caused by radical luminescence processes on the surface of aerosol microparticles of the SiO2 formed. The generation of energy by the interaction of gas-phase species with the SiO2 surface at the initial stages of the phase formation depends on the presence of the intrinsic structural defects Si+ and defects like Si+ implanted into SiO2. The addition of SF6 to the starting mixture results in the appearance of emission bands due to the Si+ defects in the radical luminescence spectrum.

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REFERENCES

  1. Chapple-Sokol, J.D. and Gordon, R.F., Thin Solid Films, 1989, vol. 171, p. 291.

    Google Scholar 

  2. Khairutdinov, R.F., Usp. Khim., 1998, vol. 67, no. 2, p. 125.

    Google Scholar 

  3. Shantarovich, P.S., Acta Physicochem. URSS, 1935, vol. 2, p. 633.

    Google Scholar 

  4. Emeleus, H.J. and Stewart, K., J. Chem. Phys., 1935, vol. 2, no. 1, p. 1182.

    Google Scholar 

  5. Azatyan, V.V., Usp. Khim., 1985, vol. 54, no. 1, p. 33.

    Google Scholar 

  6. Azatyan, V.V., Kalkanov, V.A., and Shavard, A.A., React. Kinet. Catal. Lett., 1980, vol. 15, no. 3, p. 367.

    Google Scholar 

  7. Azatyan, V.V., Aivazyan, R.G., Kalkanov, V.A., and Shavard, A.A., Kinet. Katal., 1985, vol. 26, no. 6, p. 1287.

    Google Scholar 

  8. Van de Weijer, P. and Zwerver, B.H., Chem. Phys. Lett., 1988, vol. 153, no. 1, p. 33.

    Google Scholar 

  9. Braun, V.R., Krasnoperov, A.N., and Panfilov, V.N., Dokl. Akad. Nauk SSSR, 1981, vol. 260, no. 4, p. 901.

    Google Scholar 

  10. Azatyan, V.V., Aivazyan, R.G., Kalkanov, V.A., Merzhanov, A.G., and Shavard, A.A., Khim. Fiz., 1983, vol. 2, no. 8, p. 1056.

    Google Scholar 

  11. Arutyunyan, S.A. and Sarkisyan, E.N., Arm. Khim. Zh., 1982, vol. 35, no. 1, p. 3.

    Google Scholar 

  12. Rubtsov, N.M., Azatyan, V.V., Tswetkov, G.I., and Temchin, S.M., Mendeleev Commun., 1997, no. 1, p. 187.

  13. Koda, S. and Fujiwara, O., Combust. Flame, 1988, vol. 73, p. 187.

    Google Scholar 

  14. Suga, S. and Koda, S., Jpn. J. Appl. Phys., 1988, vol. 27, p. 1966.

    Google Scholar 

  15. Azatyan, V.V., Vartanyan, A.A., Kalkanov, V.A., and Temchin, S.M., Kinet. Katal., 1991, vol. 32, no. 2, p. 511.

    Google Scholar 

  16. Rubtsov, N.M., Tsvetkov, G.I., and Chernysh, V.I., Kinet. Katal., 1997, vol. 38, no. 4, p. 498.

    Google Scholar 

  17. Vartanyan, A.A., Cand. Sci. (Chem.) Dissertation, Chernogolovka: Inst. of Chemical Physics, 1991.

  18. Glinski, R.J., Gole, J.H., and Dixon, D.A., J. Am. Chem. Soc., 1985, vol. 107, p. 5891.

    Google Scholar 

  19. Inoue, G. and Suzuki, M., Chem. Phys. Lett., 1985, vol. 122, no. 4, p. 361.

    Google Scholar 

  20. Hager, G., Wilson, L.E., and Hadley, S.F., Chem. Phys. Lett., 1974, vol. 27, p. 439.

    Google Scholar 

  21. Van de Weijer, P. and Zwerver, B.H., Chem. Phys. Lett., 1989, vol. 163, no. 1, p. 48.

    Google Scholar 

  22. Brus, L.E. and Comac, J., J. Chem. Phys., 1981, vol. 54, p. 2771.

    Google Scholar 

  23. Chung, S.L., Tsai, M.S., and Lin, H.D., Combust. Flame, 1991, vol. 85, p. 134.

    Google Scholar 

  24. Tokuhashi, K., Horuguchi, S., Urano, Y., Iwasaka, M., Ohtahi, H., and Kondo, S., Combust. Flame, 1990, vol. 89, p. 40.

    Google Scholar 

  25. Hartman, J.R., Famil-Ghirina, J., Ring, M.A., and O'Neal, H.E., Combust. Flame, 1987, vol. 68, p. 43.

    Google Scholar 

  26. Ho, P. and Breiland, W.F., J. Appl. Phys., 1988, vol. 63, p. 5184.

    Google Scholar 

  27. Deutsch, T.F., J. Chem. Phys., 1979, vol. 70, p. 1187.

    Google Scholar 

  28. Bedja, J. and Kamat, P.V., J. Phys. Chem., 1995, vol. 99, p. 9182.

    Google Scholar 

  29. Baraban, A.P., Bulavinov, V.V., and Konorov, P.P., Elektronika sloev SiO 2 na kremnii (Electronics of SiO2 Layers on Silicon), Leningrad: Leningrad. Gos. Univ., 1988.

    Google Scholar 

  30. Streletskii, A.N., Panovich, A.B., Gachkovskii, V.F., Aristov, Yu.I., Rufov, Yu.N., and Butyagin, P.Yu., Khim. Fiz., 1982, vol. 1, no. 7, p. 938.

    Google Scholar 

  31. El-Shall, M.S., Turkki, T., Graiver, D., Pernisz, U.C., and Baraton, M.I., J. Phys. Chem., 1995, vol. 99, no. 5, p. 1785.

    Google Scholar 

  32. Rufov, Yu.N., Doctoral (Chem.) Dissertation, Moscow: Inst. of Chemical Physics, 1985.

  33. Rubtsov, N.M., Tsvetkov, G.I., and Chernysh, V.I., Kinet. Katal., 1998, vol. 39, no. 3, p. 330.

    Google Scholar 

  34. Azatyan, V.V., Lukashev, A.S., Nagornyi, S.S., Rubtsov, N.M., and Temchin, S.M., Kinet. Katal., 1993, vol. 34, no. 3, p. 404.

    Google Scholar 

  35. Kharlamov, V.F., Rekombinatsiya atomov na poverkhnosti tverdykh tel i soputstvuyushchie effekty (Recombination of Atoms on Solid Surfaces and Accompanying Effects), Tomsk: Tomsk State Univ., 1994.

    Google Scholar 

  36. Karpov, V.P., Rubtsov, N.M., Ryshkov, O.T., et al., Proc. Zel'dovich Memorial Conf., 1994, vol. 2, p. 33.

    Google Scholar 

  37. Chernysh, V.I., Rubtsov, N.M., and Ryzhkov, O.T., Kinet. Katal., 1995, vol. 36, no. 5, p. 645.

    Google Scholar 

  38. Tolstikov, G.A., Sharipov, G.L., Voloshin, A.I., and Kazakov, V.P., Dokl. Akad. Nauk SSSR, 1984, vol. 274, no. 3, p. 658.

    Google Scholar 

  39. Dubois, I., Can. J. Phys., 1968, vol. 46, p. 2485.

    Google Scholar 

  40. Karpov, V.P., Rubtsov, N.M., Tsvetkov, G.I., and Chernysh, V.I., Khim. Fiz., 2000, vol. 19, no. 8, p. 74.

    Google Scholar 

  41. Zhao, X., Schoenfeld, O., Komuro, S., Aoyagi, Y., and Sugano, T., Phys. Rev. B: Condens. Matter, 1994, vol. 50, no. 24, p. 18654.

    Google Scholar 

  42. Conner, C.P. and Stewart, E.W., J. Am. Chem. Soc., 1977, vol. 13, p. 2544.

    Google Scholar 

  43. Baraban, A.P., Konorov, P.P., Malyavka, L.V., and Troshikhin, A.G., Fiz. Tverd. Tela, 2000, vol. 70, no. 8, p. 87.

    Google Scholar 

  44. Ratnov, A.G., Rubtsov, N.M., Temchin, S.M., and Dement'ev, A.P., Mikroelektronika, 1996, vol. 25, no. 2, p. 32.

    Google Scholar 

  45. Filippov, V.V., Pershukevich, P.P., Kuznetsova, V.V., Khomenko, V.S., and Dolgii, L.N., Zh. Prikl. Spektrosk., 2000, vol. 67, no. 5, p. 619.

    Google Scholar 

  46. Tsybeskov, L., Vandushev, Yu.V., and Fauchet, P.M., Phys. Rev. B: Condens. Matter, 1994, vol. 49, p. 7821.

    Google Scholar 

  47. Azatyan, V.V., Aivazyan, R.G., Dzhabiev, I.T., and Dzhabiev, T.S., Kinet. Katal., 1997, vol. 38, no. 1, p. 97.

    Google Scholar 

  48. Grankin, V.P. and Shalimov, V.Yu., Zh. Prikl. Spektrosk., 1999, vol. 66, no. 6, p. 809.

    Google Scholar 

  49. Anderson, P.W., Phys. Rev., 1958, vol. 109, p. 1492.

    Google Scholar 

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Authors and Affiliations

  1. Institute of Structural Macrokinetics, Russian Academy of Sciences, Chernogolovka, Moscow oblast, 142432, Russia

    V. I. Chernysh, N. M. Rubtsov & G. I. Tsvetkov

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  1. V. I. Chernysh
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  2. N. M. Rubtsov
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  3. G. I. Tsvetkov
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Chernysh, V.I., Rubtsov, N.M. & Tsvetkov, G.I. Flame Emission Spectra in the Region 400–600 nm during Low-Pressure Silane and Dichlorosilane Oxidation. Kinetics and Catalysis 43, 445–452 (2002). https://doi.org/10.1023/A:1019822614392

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