Journal of Materials Science

, Volume 34, Issue 19, pp 4661–4664 | Cite as

Fabrication of piezoelectric thin film of zinc oxide in composite membrane of ultrasonic microsensors

  • J. Go Biowski


The fabrication of the thin piezoelectric layers on the silicon substrate by means of the pulse dc and the dc magnetron sputtering methods is discussed. The influences of the different kind of the surface, the conditions of deposition as well as the process of the thermal stabilising on the properties of the piezoelectric layer were investigated. The results of the investigations of the diffraction spectrum for the thin ZnO films are presented and discussed. The selection of the technological process parameters for the production of the thin ZnO layers in the sensor membranes with the ultrasonic wave generated was analysed.


Silicon Zinc Thermal Stabilise Technological Process Silicon Substrate 
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Copyright information

© Kluwer Academic Publishers 1999

Authors and Affiliations

  • J. Go Biowski
    • 1
  1. 1.Institute of Theoretical Electrotechnics, Metrology and Materials ScienceTechnical University of ódźPoland

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