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Kinetics of Dichlorosilane Separation from a Mixture of Chlorosilanes by Distillation Using a Regular Packing

  • V. M. Vorotyntsev
  • G. M. Mochalov
  • M. A. Kolotilova
Article

Abstract

Trichlorosilane disproportionation followed by dichlorosilane separation from the resulting mixture of silicon compounds in a regularly packed distillation column is considered. The dynamic and mass-transfer properties of the regular packing are studied theoretically and experimentally. Kinetic data are calculated for distillation in a column with a bottom reboiler operated in the discrete dichlorosilane drawoff mode. The calculated data are in satisfactory agreement with experimental data.

Keywords

Silicon Experimental Data Kinetic Data Disproportionation Satisfactory Agreement 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© MAIK “Nauka/Interperiodica” 2004

Authors and Affiliations

  • V. M. Vorotyntsev
    • 1
  • G. M. Mochalov
    • 1
  • M. A. Kolotilova
    • 1
  1. 1.Nizhni Novgorod State Technical University, ulMininaRussia

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