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Journal of Materials Science

, Volume 39, Issue 10, pp 3309–3318 | Cite as

Synthesis of HDLC films from solid carbon

  • R. L. Mills
  • J. Sankar
  • P. Ray
  • A. Voigt
  • J. He
  • B. Dhandapani
Article

Abstract

Diamond-like carbon (DLC) films were synthesized on silicon substrates from solid carbon by a very low power (∼60 W) microwave plasma chemical vapor deposition (MPCVD) reaction of a mixture of 90–70% helium and 10–30% hydrogen. It is proposed that He+ served as a catalyst with atomic hydrogen to form an energetic plasma. The average hydrogen atom temperature of a helium-hydrogen plasma was measured to be up to 180–210 eV versus ≈3 eV for pure hydrogen. Bombardment of the carbon surface by highly energetic hydrogen formed by the catalysis reaction may play a role in the formation of DLC. The films were characterized by time of flight secondary ion mass spectroscopy (ToF-SIMS), X-ray photoelectron spectroscopy (XPS), and Raman spectroscopy. TOF-SIMS identified the coatings as hydride by the large H+ peak in the positive spectrum and the dominant H in the negative spectrum. The XPS identification of the H content of the CH coatings as a novel hydride corresponding to a peak at 49 eV has implications that the mechanism of the DLC formation may also involve one or both of selective etching of graphitic carbon and the stabilization of sp3-bonded carbon by the hydrogen catalysis product. Thus, a novel H intermediate formed by the plasma catalysis reaction may enhance the stabilization and etching role of H used in past methods.

Keywords

Hydride Solid Carbon Selective Etching Atom Temperature Negative Spectrum 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Kluwer Academic Publishers 2004

Authors and Affiliations

  • R. L. Mills
    • 1
  • J. Sankar
    • 1
  • P. Ray
    • 1
  • A. Voigt
    • 1
  • J. He
    • 1
  • B. Dhandapani
    • 1
  1. 1.BlackLight Power, Inc.CranburyUSA

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