3D atomic imaging of SiGe system by X-ray fluorescence holography
- Cite this article as:
- Hayashi, K., Takahashi, Y., Matsubara, E. et al. Journal of Materials Science: Materials in Electronics (2003) 14: 459. doi:10.1023/A:1023993911437
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X-ray fluorescence holography (XFH) provides three-dimensional atomic images around specific elements without any assumption of the structural model. Six X-ray holograms of Si0.8Ge0.2/Si at different energies were measured at the synchrotron radiation facility of SPring-8. Si and/or Ge atoms within 0.7 nm of a radius were clearly visible in the atomic images reconstructed from the holograms. From these images, slight displacements of the images at each shell in between Si0.8Ge0.2/Si and the Ge bulk were distinctly revealed. This demonstrated that the XFH method has a great potential to quantitatively analyze a three-dimensional local lattice structure in epitaxial crystals.