3D atomic imaging of SiGe system by X-ray fluorescence holography

  • K. Hayashi
  • Y. Takahashi
  • E. Matsubara
  • K. Nakajima
  • N. Usami


X-ray fluorescence holography (XFH) provides three-dimensional atomic images around specific elements without any assumption of the structural model. Six X-ray holograms of Si0.8Ge0.2/Si at different energies were measured at the synchrotron radiation facility of SPring-8. Si and/or Ge atoms within 0.7 nm of a radius were clearly visible in the atomic images reconstructed from the holograms. From these images, slight displacements of the images at each shell in between Si0.8Ge0.2/Si and the Ge bulk were distinctly revealed. This demonstrated that the XFH method has a great potential to quantitatively analyze a three-dimensional local lattice structure in epitaxial crystals.


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  1. 1.
    D. Gabor, Nature 161 (1948) 777.Google Scholar
  2. 2.
    A. SzÖke, in “Short Wavelength Coherent Radiation: Generation and Applications”, edited by D. T. Attwood and J. Boker, AIP Conf. Proc. 147 (American Institute of Physics, New York, 1986) pp. 361–367.Google Scholar
  3. 3.
    M. Tegze and G. Feigel, Nature 380 (1996) 49.Google Scholar
  4. 4.
    J. Kawai, K. Hayashi, T. Yamamoto, S. Hayakawa and Y. Gohshi, Anal. Sci. 14 (1998) 903.Google Scholar
  5. 5.
    K. Hayashi, M. Sai, T. Yamamoto, J. Kawai, M. Nishino, S. Hayakawa and Y. Gohshi, Jpn. J. Appl. Phys. 39 (2000) 1414.Google Scholar
  6. 6.
    K. Hayashi, Y. Takahashi, E. Matsubara, S. Kishimoto, T. Mori, M. Tanaka, S. Hayakawa and M. Suzuki, in “Proceedings of the Fourth Pacific Rim International Conference on Advanced Materials and Processing”, edited by S. Hanada and Z. Zhong, S. W. Nam and R. N. Wright (The Japan Institute of Metals, Honolulu, 2001) pp. 567–570.Google Scholar
  7. 7.
    K. Hayashi, Y. Takahashi, E. Matsubara, S. Kishimoto, T. Mori and M. Tanaka, Nucl. Instrum. Meth. B 196 (2002) 180.Google Scholar
  8. 8.
    K. Hayashi, M. Matsui, Y. Awakura, T. Kaneyoshi, H. Tanida and M. Ishii, Phys. Rev. B 63 (2001) R41201.Google Scholar
  9. 9.
    S. Marchesini, F. SchmithÜsen, M. Tegze, G. Faigel, Y. Calvayrac, M. Belakhovsky, J. Chevrier and A. S. Simionovici, Phys. Rev. Lett. 27 (2000) 4732.Google Scholar
  10. 10.
    T. P. Pearsall, Mater. Sci. Eng. B 9 (1991) 225.Google Scholar
  11. 11.
    M. Matsuura, J. M. Tonnerre and G. S. Calgill III, Phys. Rev. B 44 (1991) 3842.Google Scholar
  12. 12.
    I. Yonenaga and M. Sakurai, ibid. 64 (2001) 113206.Google Scholar
  13. 13.
    J. C. Woicik, K. E. Miyano, C. A. King, R. W. Johnson, J. G. Pellegrino, T.-L. Lee and Z. H. Lu, ibid. 57 (1998) 14592.Google Scholar
  14. 14.
    J. Z. Tischler, J. D. Budai, D. E. Jesson, G. Eres and P. Zschack, J.-M. Baribeau and D. C. Houghton, ibid. 51 (1995) 10947.Google Scholar
  15. 15.
    T. Gog, P. M. Len, G. Materik, D. Bahr, C. S. Fadley and C. Sanchez-Hanke, Phys. Rev. Lett. 76 (1996) 3132.Google Scholar
  16. 16.
    P. M. Len, T. Gog, C. S. Fadley and G. Materlik, Phys. Rev. B 55 (1997) R3323.Google Scholar
  17. 17.
    J. J. Barton, Phys. Rev. Lett. 67 (1991) 3106.Google Scholar
  18. 18.
    K. Hayashi, M. Miyake, T. Tobioka, Y. Awakura and M. Suzuki and S. Hayakawa, Nucl. Instrum. Meth. Phys. Red. B 467–468 (2001) 1241.Google Scholar

Copyright information

© Kluwer Academic Publishers 2003

Authors and Affiliations

  • K. Hayashi
    • 1
  • Y. Takahashi
    • 1
  • E. Matsubara
    • 1
  • K. Nakajima
    • 1
  • N. Usami
    • 1
  1. 1.Institute for Materials ResearchTohoku University of Aoba-kuSendaiJapan

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