Elaboration of ZnO Thin Films with Preferential Orientation by a Soft Chemistry Route
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Microcrystalline ZnO films presenting well-defined and tunable orientation were obtained by spin coating of alcoholic sols by two different approaches, based on controlled hydrolysis-condensation of Zn-ethanolamine complexes. As-deposited films are formed by amorphous zinc oxide-acetate submicronic particles, which are transformed into oriented ZnO after thermal treatment. The orientation of ZnO depends on the synthesis method, and the solvent. While in ethanol and [Zn] = 0.05 mol·L−1, films consist of rectangular platelets oriented with the (100) planes parallel to the substrate (a//n), the orientation of the particles changes to (c//n) for systems in 2-methoxyethanol (2-ME) and [Zn] = 0.75 mol·L−1. A study of chemical factors that influence the orientation (precursor, solvent, MEA/Zn ratio, concentration, coating parameters, heat treatment) is presented.
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- 1.M. Ohyama, H. Kozuka, T. Yoko, and S. Sakka, J. Ceram. Soc. Japan 104, 296 (1996).Google Scholar
- 2.D. Bao, H. Gu, and A. Kuang, Thin Solid Films 312, 37 (1998).Google Scholar
- 3.Z.K. Tang, G.K.L. Wong, P. Yu, M. Kawasaki, A. Ohtomo, H. Koinuma, and Y. Segawa, Appl. Phys. Lett. 72, 3270 (1998).Google Scholar
- 4.M. Peneza, C. Martucci, V.I. Anisimkin, and L. Vasanelli, Mater. Sci. Forum 203, 137 (1996).Google Scholar
- 5.A. Ghosh and S. Basu, Mater. Chem. Phys. 27, 45 (1991); J. De Merchant and M. Cocivera, Chem. Mater. 7, 1742 (1995).Google Scholar
- 6.L. Spanhel and M.A. Anderson, J. Am. Chem. Soc. 113, 2826 (1991).Google Scholar
- 7.S. Sakohara, L.D. Tickanen, and M.A. Anderson, J. Phys. Chem. 96, 11086 (1992).Google Scholar
- 8.M. Ohyama, H. Kozuka, and T. Yoko, Thin Solid Films 306, 78 (1997).Google Scholar
- 9.S. Doeuff, M. Henry, C. Sanchez, and J. Livage, J. Non-Cryst. Solids 89, 206 (1987); S. Barboux-Doeuff and C. Sanchez, Mat. Res. Bull. 29, 1 (1994).Google Scholar
- 10.G. Socrates, Infrared Characteristic Group Frequencies, 2nd edn. (Wiley, Chichester, 1994); K. Nakamoto, Infrared and Raman Spectra of Inorganic and Coordination Compounds, 4th edn. (Wiley, New York, 1986).Google Scholar
- 11.M. Ohyama, H. Kozuka, and T. Yoko, J. Amer. Ceram. Soc. 81, 1622 (1997).Google Scholar
- 12.A. Guinier, Théorie et Technique de la Radiocristallographie (Dunod, Paris, 1964).Google Scholar