Abstract
In GaAs based infrared detectors, a considerable part of the incident light will be reflected at the surface, thus it decreases the detectors sensitivity considerably. In this paper, a TiO2 nanoporous coating was prepared successfully on the GaAs substrate by sol-gel method. The optical parameters of the coating were also controlled successfully. It was proved that the coating could greatly improve the transmittance of the incident light, which agrees with the theoretical results quite well. In the 2.5–6.0 μm waveband, the maximum transmittance of GaAs substrate is 56%, while the transmittance of the GaAs substrate coated with a nanostructured TiO2 coating is about 94%.
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Shen, J., Yang, T., Zhang, Q. et al. Nanoporous TiO2 Coatings for Infrared Detectors. Journal of Sol-Gel Science and Technology 26, 1029–1032 (2003). https://doi.org/10.1023/A:1020781901791
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DOI: https://doi.org/10.1023/A:1020781901791