Journal of Sol-Gel Science and Technology

, Volume 26, Issue 1–3, pp 903–907

Fabrication of Two-Dimensional Gratings Using Photosensitive Gel Films and Their Characterization

  • Noboru Tohge
  • Masaya Hasegawa
  • Naoki Noma
  • Kenji Kintaka
  • Junji Nishii
Article

DOI: 10.1023/A:1020780506817

Cite this article as:
Tohge, N., Hasegawa, M., Noma, N. et al. Journal of Sol-Gel Science and Technology (2003) 26: 903. doi:10.1023/A:1020780506817

Abstract

Two-dimensional (2D) surface-relief gratings have been fabricated by the two-beam interference method on photosensitive gel films, which are derived from chemically modified metal-alkoxides, and characterized with respect to surface morphology and antireflection effect. Photosensitive ZrO2 gel film was deposited on a silica glass substrate using the sol that was prepared from Zr-tetrabutoxide chemically modified with benzoylacetone. The gel film was exposed to two-beam interference fringe (1.0 μm period) of He-Cd laser and then rotated by 90° in its own plane, followed by an additional exposure. Leaching of the gel film with ethanol gave lattice or island types of 2D-gratings depending on the dose of laser irradiation. The morphology of the gratings changed with irradiation time of laser, leaching conditions and so on. The formation of 2D-grating of island type on a silica glass substrate substantially reduced the reflection at its surface in a wavelength range of 1.3 to 2.6 μm.

chemical modification photosensitivity patterning diffraction grating antireflection 

Copyright information

© Kluwer Academic Publishers 2003

Authors and Affiliations

  • Noboru Tohge
  • Masaya Hasegawa
  • Naoki Noma
  • Kenji Kintaka
  • Junji Nishii

There are no affiliations available

Personalised recommendations