Journal of Sol-Gel Science and Technology

, Volume 21, Issue 3, pp 189–193

Orientation and Surface Properties of Sol-Gel Derived Y2O3 Films

  • T. Nishide
  • M. Shibata


The orientation, surface and optical properties of sol-gel derived Y2O3 films have been investigated. Transparent Y2O3 films were prepared on quartz glass substrates by sol-gel processes using YCl3·6H2O as a starting material. The water droplet contact angles of the films reached constant values between 79° and 90° after the films were left for 8 to 10 days in air at ambient temperature, indicating that the film surface exhibited hydrophobicity. When 2-(2-methoxyethoxy)ethanol (MEE) was added to the sol, yttria in the films crystallized to a strongly oriented cubic phase at firing temperatures between 400°C and 500°C. The intensity of the XRD peaks increased as the firing temperature was increased to 900°C. However, yttria crystallized to a non-oriented cubic phase when MEE was not used. The refractive index and packing density of the Y2O3 films increased from 1.55 to 1.68 and from 0.67 to 0.79, respectively, as the firing temperature was raised from 400°C to 900°C, indicating that sol-gel derived Y2O3 films are lower in density than evaporated ones.

Y2O3 orientation X-ray diffraction refractive index hydrophobicity 


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  1. 1.
    K. Mehta, R. Xu, and A.V. Virkar, J. Sol-Gel Sci. Technol. 11, 203 (1998).Google Scholar
  2. 2.
    J. Kim and Y.S. Lin, J. Membr. Sci. 139, 75 (1998).Google Scholar
  3. 3.
    R.P. Rao, Solid State Commun. 99, 439 (1996).Google Scholar
  4. 4.
    R.P. Rao, J. Electrochem. Soc. 143, 189 (1996).Google Scholar
  5. 5.
    A.A. Hussain and M. Sayer, Vacuum 44, 41 (1993).Google Scholar
  6. 6.
    A.A. Hussain and M. Sayer, Vacuum 43, 1195 (1992).Google Scholar
  7. 7.
    Y. Taga and T. Ohwaki, J. Surface Finishing Jpn. 47, 15 (1996).Google Scholar
  8. 8.
    Y. Taga, J. Non-Crys. Solids 218, 335 (1997).Google Scholar
  9. 9.
    T. Ohwaki and Y. Taga, J. Surface Finishing Jpn. 49, 191 (1998).Google Scholar
  10. 10.
    C.J. Brinker and G.W. Scherer, Sol-Gel Science: The Physics and Chemistry of Sol-Gel Processing (Academic Press, San Diego, 1990).Google Scholar
  11. 11.
    T. Nishide, S. Honda, M. Matsuura, and M. Ide, Thin Solid Films 371, 61 (2000).Google Scholar
  12. 12.
    T. Nishide and F. Mizukami, J. Mater. Sci. 15, 1149 (1996).Google Scholar
  13. 13.
    K. Kato, A. Tsuge, and K. Niihara, J. Am. Ceram. Soc. 79, 1483 (1996).Google Scholar
  14. 14.
    K. Kato and K. Niihara, Thin Solid Films 298, 76 (1997).Google Scholar
  15. 15.
    H. Yamamura, Y. Iwata, and C. Matsuno, J. Ceram. Soc. Jpn. 105, 918 (1997).Google Scholar
  16. 16.
    T. Nishide and F. Mizukami, Thin Solid Films 298, 89 (1997).Google Scholar
  17. 17.
    L. Holland, The Properties of Glass Surfaces (Chapman and Hall, London, 1994).Google Scholar
  18. 18.
    Joint Committee for Powder Diffraction Standards, JCPDS Card No. 411105 (Joint Committee for Powder Diffraction Standards, Swarthmore, Pennsylvania, 1991).Google Scholar
  19. 19.
    H.K. Pulker, Appl. Opt. 18, 1969 (1979).Google Scholar
  20. 20.
    Y. Nigara, Ipn. J. Appl. Phys. 7, 404 (1968).Google Scholar
  21. 21.
    G. Bauer, Ann. Phys. 19, 434 (1934).Google Scholar
  22. 22.
    R.G. Tauc and A. Vancu, Phys. Status Solidi 15, 627 (1966).Google Scholar
  23. 23.
    N.F. Mott and E.A. Davis, Electronic Processes in Non-Crystalline Materials (Claredndon Press, Oxford, 1971).Google Scholar
  24. 24.
    G. Compagnini, G. Foti, R. Reitano, and G. Mondio, J. Non-Cryst. Solids 162, 237 (1993).Google Scholar
  25. 25.
    P. Chrysicopoulou, D. Davazoglou, C. Trapalis, and G. Kordas, Thin Solid Films 323, 188 (1998).Google Scholar

Copyright information

© Kluwer Academic Publishers 2001

Authors and Affiliations

  • T. Nishide
    • 1
  • M. Shibata
    • 1
  1. 1.Department of Materials Chemistry and Engineering, College of EngineeringNihon UniversityTamura, KoriyamaJapan

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