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Russian Microelectronics

, Volume 30, Issue 1, pp 29–34 | Cite as

Acoustic Microscopy in Micrometrology

  • V. S. Kuznetsov
  • S. A. Ogorodnikov
  • M. N. Preobrazhenskii
  • A. V. Prokaznikov
Article
  • 15 Downloads

Abstract

In-depth analysis of the propagation of an acoustic signal excited by a short radio pulse is performed. The signal is reflected from the simple lens of a scanning acoustic microscope, and its power is detected. An expression for V(z) curve (acoustic signature of a material) is derived. It takes into account excitation conditions (delay and recording times of a signal to be detected) and lens parameters.

Keywords

Microscopy Acoustic Signal Recording Time Excitation Condition Radio Pulse 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© MAIK “Nauka/Interperiodica” 2001

Authors and Affiliations

  • V. S. Kuznetsov
    • 1
  • S. A. Ogorodnikov
    • 1
  • M. N. Preobrazhenskii
    • 2
  • A. V. Prokaznikov
    • 2
  1. 1.Demidov State UniversityYaroslavlRussia
  2. 2.Institute of MicroelectronicsRussian Academy of SciencesYaroslavlRussia

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