Russian Microelectronics

, Volume 30, Issue 1, pp 29–34 | Cite as

Acoustic Microscopy in Micrometrology

  • V. S. Kuznetsov
  • S. A. Ogorodnikov
  • M. N. Preobrazhenskii
  • A. V. Prokaznikov


In-depth analysis of the propagation of an acoustic signal excited by a short radio pulse is performed. The signal is reflected from the simple lens of a scanning acoustic microscope, and its power is detected. An expression for V(z) curve (acoustic signature of a material) is derived. It takes into account excitation conditions (delay and recording times of a signal to be detected) and lens parameters.


Microscopy Acoustic Signal Recording Time Excitation Condition Radio Pulse 
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Copyright information

© MAIK “Nauka/Interperiodica” 2001

Authors and Affiliations

  • V. S. Kuznetsov
    • 1
  • S. A. Ogorodnikov
    • 1
  • M. N. Preobrazhenskii
    • 2
  • A. V. Prokaznikov
    • 2
  1. 1.Demidov State UniversityYaroslavlRussia
  2. 2.Institute of MicroelectronicsRussian Academy of SciencesYaroslavlRussia

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