Absolute lattice parameter measurement

  • P. F. Fewster
Article

Abstract

Absolute lattice parameter methods are useful for determining alloy composition, understanding point defects and dopants in semiconductor substrate materials and for the evaluation of lattice relaxation in heteroepitaxial layers. This paper reviews the techniques available. The assumptions and uncertainties of each technique are discussed.

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Copyright information

© Kluwer Academic Publishers 1999

Authors and Affiliations

  • P. F. Fewster
    • 1
  1. 1.Philips Research LaboratoriesRedhillUK

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