Journal of Sol-Gel Science and Technology

, Volume 13, Issue 1–3, pp 769–773

Atomic Force Microscopy Study of TiO2 Films Obtained by the Sol-Gel Method

  • Maria Zaharescu
  • Maria Crisan
  • I. MuŠeviČ


Atomic Force Microscopy (AFM) was used to study the influence of thermal treatments on the structural and textural properties of the sol-gel TiO2 films obtained from Ti(OC3H7i)4. X-ray diffraction (XRD), ellipsometric and porosity measurements have also been made.

The TiO2 sol-gel films were homogeneous, transparent and amorphous. Heat treatments in the 400–600°C range indicate that the films have a strong tendency to crystallization. The high initial homogeneity of the TiO2 films was preserved during the crystallization process. AFM shows that the thermally treated films exhibit uniform, monodispersed crystals.

TiO2 films sol-gel method AFM study 


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Copyright information

© Kluwer Academic Publishers 1998

Authors and Affiliations

  • Maria Zaharescu
    • 1
  • Maria Crisan
    • 1
  • I. MuŠeviČ
    • 2
  1. 1.Institute of Physical ChemistryRomanian AcademyBucharestRomania
  2. 2.J. Stefan InstituteLjubljanaSlovenija

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