Journal of Materials Science Letters

, Volume 19, Issue 21, pp 1883–1885 | Cite as

Chemical structure modification of silicone surfaces by plasma immersion ion implantation

  • I. F. Husein
  • Chung Chan
  • P. K. Chu
Article

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Copyright information

© Kluwer Academic Publishers 2000

Authors and Affiliations

  • I. F. Husein
    • 1
  • Chung Chan
    • 2
  • P. K. Chu
    • 3
  1. 1.Plasma Science and Microelectronics Laboratory, Department of Electrical and Computer EngineeringNortheastern UniversityBostonUSA
  2. 2.Plasma Science and Microelectronics Laboratory, Department of Electrical and Computer EngineeringNortheastern UniversityBostonUSA
  3. 3.Department of Physics and Materials ScienceCity University of Hong KongKowloonHong Kong, People's Republic of China

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