Journal of Materials Science

, Volume 35, Issue 11, pp 2689–2693

Preparation and characterization of superhard TiC/Mo multilayers

  • Jing Wang
  • Wen-Zhi Li
  • Heng-De Li


Nanometer scale TiC/Mo multilayers have been prepared by ion beam assisted deposition (IBAD) at nearly ambient temperature. The modulation wavelength was in the range of 2 nm to 14 nm and the individual layer thickness was maintained to be equal. Two series (series A and series B) were prepared which were bombarded with different bombarding energy (0 eV and 50 eV) in order to investigate the bombardment effect on the nano-hardness of the multilayers. Low angle X-ray diffraction (LXRD) was used to analyzed the layered structure of multilayers. Mechanical properties of these multilayers were thoroughly studied using a nanoindentation facility. The nanohardness showed a strong dependence on the sharpness of the interlayer and the modulation wavelength. It was found that the multilayer hardness was greater than the volume weighted mean of the component hardness. With the modulation wavelength adjusted, the multilayer can be even harder than its hard component (TiC). A maximum hardness of 47.62 GPa, about 1.5 times larger than that of the TiC values, was found at λ = 8 nm multilayer deposited without ion beam bombardment. It was also found that the films without ion bombardment were much harder than those bombarded by 50 eV Ar+ ion beam.


Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.


  1. 1.
    U. Helmesson, S. Todorova, S. A. Barnett, J.-E. Sundgren, L. C. Markert and J. E. Greene, J. Appl. Phys. 62 (1987) 481.Google Scholar
  2. 2.
    M. Shinn, L. Hultman, L. Hultman and S. A. Barnett, J. Mater. Res. 7(4) (1992) 901.Google Scholar
  3. 3.
    R. C. Cammarata and T. E. Schlesinger, Appl. Phys. Lett. 56(19) (1990) 1862.Google Scholar
  4. 4.
    X. Chu, M. S. Wong, W. D. Sproul and L. Rohde, J. Vac. Sci. Technol. A 10(4) (1992) 1604.Google Scholar
  5. 5.
    X. Chu and S. A. Barnett, Surf. and Coat. Technol. 57 (1993) 13.Google Scholar
  6. 6.
    X. Chu, M. S. Wong, W. D. Sproul and S. A. Barnett, ibid. 61 (1993) 251.Google Scholar
  7. 7.
    T. C. Chou, T. G. Nieh, T. Y. Tsui, G. M. Pharr and W. C. Oliver, J. Mater. Res. 7 (1992) 2765.Google Scholar
  8. 8.
    H. Ljungcrantz, thesis, Linkoping University, Linkoping, Sweden, 1995.Google Scholar
  9. 9.
    R. W. Springer and C. D. Hosford, J. Vac. Sci. Technol. 20 (1982) 462.Google Scholar
  10. 10.
    Y. Ding, Z. Farhat, D. O. Northwood and A. T. Alpas, Surf. Coat. Technol. 68-69 (1994) 459.Google Scholar
  11. 11.
    X. M. He, W. Z. Li and H. D. Li, J. Mater. Res. 9 (1994) 2355.Google Scholar
  12. 12.
    H. D. Li and X. M. He, Bulletin of MRS 17 (1994) 1415.Google Scholar
  13. 13.
    H. E. Boyer, “Hardness Testing” (ASM International, Metals Park, OH, 1987).Google Scholar
  14. 14.
    P. B. Mirkarimi, M. Shinn. S. A. Barnett, S. Kumar and M. Grimsditch, J. Appl. Phys. 71 (1992) 4955.Google Scholar
  15. 15.
    J. O. Kim, J. D. Achenbach, P. B. Mirkarimi and S. A. BARNETT, Phys Rev. B 48 (1993) 1726.Google Scholar
  16. 16.
    J. O. Kim, J. D. Achenbach, M. Shinn and S. A. V. Barnett, J. Mater. Res. 7(8) (1992) 2248.Google Scholar
  17. 17.
    X. Wang, A. Kolitsch and W. Moller, Appl. Phys. Lett. 71(14) (1997) 1951.Google Scholar

Copyright information

© Kluwer Academic Publishers 2000

Authors and Affiliations

  • Jing Wang
    • 1
  • Wen-Zhi Li
    • 1
  • Heng-De Li
    • 1
  1. 1.Department of Materials Science and EngineeringTsinghua UniversityBeijingPeople's Republic of China

Personalised recommendations