Journal of Materials Science

, Volume 34, Issue 5, pp 1051–1054 | Cite as

Improvement in the optoelectronic properties of a-SiO:H films

  • Debabrata Das
  • S. M. Iftiquar
  • Debajyoti Das
  • A. K. Barua


Hydrogenated amorphous silicon oxide (a-SiO:H) films prepared by rf plasma enhanced chemical vapour deposition (PECVD) method have recently proved their potential as a photovoltaic material for the fabrication of high efficiency multijunction amorphous silicon solar cells. If deposited under proper conditions, it may be a better wide band gap material than the normally used a-SiC : H. In this paper we report the improvements achieved over the previously reported results. The films have been characterized in detail in terms of their optoelectronic properties, structural characteristics, defect density and light induced degradation.


Polymer Solar Cell Structural Characteristic Chemical Vapour Deposition Vapour Deposition 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.


Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.


  1. 1.
    K. Haga, A. Murakami, K. Yamamoto, M. Kumanoand H. Watanabe, Jpn. J. Appl. Phys. 30(1991) 3331.Google Scholar
  2. 2.
    Y. Ichikawa, S. Fujikake, H. Ohta, T. Sasakiand H. Sakai, Proc. 22-nd IEEE Photovoltaic Conf. (LasVegas, 1991) p. 1296.Google Scholar
  3. 3.
    A. Morimoto, H. Noriyamaand T. Shimizu, Jpn. J. Appl. Phys. 26(1987) 22.Google Scholar
  4. 4.
    G. Suchaneck, O. Steinke, B. Alhallaniand K. Schade, J. Non-Cryst. Solids 187(1995) 86.Google Scholar
  5. 5.
    P. Sichanugrist, T. Yoshida, Y. Ichikawaand H. Sakai J.Non-Cryst.Solids, 164166 (1993) 1081.Google Scholar
  6. 6.
    H. Watanabe, K. Hagaand T. Lohner, J. Non-Cryst. Solids 164166 (1993) 1085.Google Scholar
  7. 7.
    S. Fujikake, H. Ohta, P. Sichanugrist, M. Ohsawa, Y. Ichikawaand H. Sakai, Optoelectronics— Devices and Technologies 9(1994) 379.Google Scholar
  8. 8.
    Debajyoti Das, S. M. Iftiquar, and A. K. Barua, J. Non-Cryst. Solids 210(1997) 148.Google Scholar
  9. 9.
    G. Lucovsky, J. Yang, S. S. Chao, J. E. Tylerand W. Czubatyj Phys. Rev. B 28(1983) 3225.Google Scholar
  10. 10.
    L. He, T. Inokuma, Y. Kurata, and S. Hasegawa, J. Non-Cryst. Solids 185(1995) 249.Google Scholar
  11. 11.
    S. H. Baker, W. E. Spear, and R. A. G. Gibson, Phil. Mag. B 62(1990) 213.Google Scholar

Copyright information

© Kluwer Academic Publishers 1999

Authors and Affiliations

  • Debabrata Das
    • 1
  • S. M. Iftiquar
    • 1
  • Debajyoti Das
    • 1
  • A. K. Barua
    • 1
  1. 1.Energy Research Unit,Indian Association for the Cultivation of Science,CalcuttaIndia

Personalised recommendations