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Analysis of Integrated Circuits and Semiconductor Materials Using IBIC Microscopy

  • Focused MeV Ion Beams for Materials Analysis and Microfabrication
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Authors
  1. Harald Schöne
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  2. David N. Jamieson
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Schöne, H., Jamieson, D.N. Analysis of Integrated Circuits and Semiconductor Materials Using IBIC Microscopy. MRS Bulletin 25, 14–20 (2000). https://doi.org/10.1017/S0883769400064800

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