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Focused MeV Ion Beams for Materials Analysis and Microfabrication

  • Focused Mev Ion Beams for Materials Analysis and Microfabrication
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References

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Authors
  1. Mark B. H. Breese
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Breese, M.B.H. Focused MeV Ion Beams for Materials Analysis and Microfabrication. MRS Bulletin 25, 11–13 (2000). https://doi.org/10.1017/S0883769400064794

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  • DOI: https://doi.org/10.1017/S0883769400064794

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