Acta Mechanica Solida Sinica

, Volume 30, Issue 3, pp 263–270 | Cite as

An elastic electrode model for wave propagation analysis in piezoelectric layered structures of film bulk acoustic resonators

Article

Abstract

Wave propagation in a piezoelectric layered structure of a film bulk acoustic resonator (FBAR) is studied. The accurate results of dispersion relation are calculated using the proposed elastic electrode model for both electroded and unelectroded layered plates. The differences of calculated cut-off frequencies between the current elastic electrode model and the simplified inertial electrode model (often used in the quartz resonator analysis) are illustrated in detail, which shows that an elastic electrode model is indeed needed for the accurate analysis of FBAR. These results can be used as an accurate criterion to calibrate the 2-D theoretical model for a real finite-size structure of FBAR.

Keywords

FBARs Elastic electrode Waves propagation Dispersion curves Inertial electrode 

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Copyright information

© The Chinese Society of Theoretical and Applied Mechanics and Technology 2017

Authors and Affiliations

  • Feng Zhu
    • 1
  • Yuxing Zhang
    • 1
  • Bin Wang
    • 1
  • Zhenghua Qian
    • 1
  1. 1.State Key Laboratory of Mechanics and Control of Mechanical Structures, College of Aerospace EngineeringNanjing University of Aeronautics and AstronauticsNanjingChina

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