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On the Interaction Between a Quartz Crystal Resonator and an Array of Micro-Beams in Thickness-Shear Vibrations

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Abstract

We studied the coupled dynamic behavior of a quartz-crystal-resonator (QCR) /micro-beams system in the thickness-shear motions. Through taking into account the couple stress in the dynamic equations of the quartz plate, both continuous conditions of shear force and bending moment at the resonator/micro-beams interface are realized. Frequency shift of the compound QCR system induced by micro-beams is studied in detail. The obtained results are useful in device design and frequency-stability analysis of quartz crystal resonators.

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Authors and Affiliations

  1. Department of Mechanics, Huazhong University of science and Technology, 430074, Wuhan, China

    Lingcheng Kong, Xuan Xie, Jun Zhang, Yuxi Wang & Yuantai Hu

Authors
  1. Lingcheng Kong
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  2. Xuan Xie
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  3. Jun Zhang
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  4. Yuxi Wang
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  5. Yuantai Hu
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Corresponding author

Correspondence to Yuantai Hu.

Additional information

Project supported by the National Nature Science Foundation of China (Nos. 11272127 and 51435006) and by Research Fund for the Doctoral Program of Higher Education of China (No. 20130142110022) and by Grant from the Impact and Safety of Coastal Engineering Initiative Program of Zhejiang Provincial Government at Ningbo University (No. zj1213).

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Kong, L., Xie, X., Zhang, J. et al. On the Interaction Between a Quartz Crystal Resonator and an Array of Micro-Beams in Thickness-Shear Vibrations. Acta Mech. Solida Sin. 28, 464–470 (2015). https://doi.org/10.1016/S0894-9166(15)30042-2

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  • DOI: https://doi.org/10.1016/S0894-9166(15)30042-2

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