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Abnormal Bending of Micro-Cantilever Plate Inducecd by a Droplet

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Abstract

The abnormal bending of a micro-cantilever plate induced by a droplet is of great interest and of significance in micro/nano-manipulations. In this study, the physical mechanism of this abnormal phenomenon induced by an actual droplet is elucidated. Firstly, the morphologies of 2D and 3D droplets are solved analytically or numerically. Then the Laplace pressure difference acting on the cantilever plate caused by the droplet is presented. Finally, the deflections of the micro-cantilever plates driven by the capillary forces are quantitatively analyzed. These analytical results may be beneficial to some engineering applications, such as micro-sensors, MEMS and the micro/nano-measurement.

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Correspondence to Jianlin Liu.

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Project supported by the National Natural Science Foundation of China (No. 10802099), the Doctoral Fund of Ministry of Education of China (No. 200804251520) and the Natural Science Foundation of Shandong Province (No. 2009ZRA05008).

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Liu, J., Zhu, X., Li, X. et al. Abnormal Bending of Micro-Cantilever Plate Inducecd by a Droplet. Acta Mech. Solida Sin. 23, 428–436 (2010). https://doi.org/10.1016/S0894-9166(10)60045-6

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  • DOI: https://doi.org/10.1016/S0894-9166(10)60045-6

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