Abstract
The cross-section profiles of polymer deformation in the hot embossing lithography process were studied by finite element method for various temperature, time and pressure. In order to successfully fabricate high-frequency grating lines, an optimal imprint condition was selected and the related experiments were carried out. The fabricated gratings were illuminated by the SEM image and AFM analysis, which agree well with the simulated results. Therefore, the finite element methods are helpful for a better comprehension of the polymer flow phenomena governing the pattern definition and the design of optimum processing conditions for successful grating fabrication.
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Project supported by the National Basic Research Program of China (Grant No.2010CB631005), National Natural Science Foundation of China (Grant Nos.10625209, 10732080, 90916010), Beijing Natural Sciences Foundation (Grant No.3072007), and Program for New Century Excellent Talents (NCET) in Universities and Chinese Ministry of Education (Grant No.NCET-05-0059).
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Zhu, J., Xie, H., Tang, M. et al. Optimum design of processing condition and experimental investigation of grating fabrication with hot embossing lithography. Acta Mech. Solida Sin. 22, 665–671 (2009). https://doi.org/10.1016/S0894-9166(09)60397-9
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DOI: https://doi.org/10.1016/S0894-9166(09)60397-9