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Strength analysis of clamping in micro/nano scale experiments

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Abstract

Two kinds of clamping in micro/nano scale experiments are investigated in this paper, one based on electron-beam-induced deposition, and the other on the van der Waals interaction. The clamping strength and mechanism are analyzed both theoretically and experimentally. The influence of relative humidity on the micro/nano clamping and the method of electrostatic clamping are discussed. The clamping strength and performance of different clamping methods are compared considering the size and material of the clamped objects, and the application environments.

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Authors and Affiliations

  1. Department of Engineering Mechanics, AML, Tsinghua University, Beijing, 100084, China

    Liang Liu, Dujuan Zeng & Xide Li

  2. Key Laboratory for the Physics and Chemistry of Nanodevices and Department of Electronics, Peking University, Beijing, 100871, China

    Xianlong Wei & Qing Chen

Authors
  1. Liang Liu
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  2. Dujuan Zeng
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  3. Xianlong Wei
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  4. Qing Chen
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  5. Xide Li
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Corresponding author

Correspondence to Xide Li.

Additional information

Project supported by the NSFC (Nos.10972113, 10572071 and 10732080), the National Basic Research Program of China (Nos.2007CB936803 and 2010CB631005), the SRFDP (No.20070003053), and the Central Laboratory of Strength and Vibration of Tsinghua University.

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Liu, L., Zeng, D., Wei, X. et al. Strength analysis of clamping in micro/nano scale experiments. Acta Mech. Solida Sin. 22, 584–592 (2009). https://doi.org/10.1016/S0894-9166(09)60389-X

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  • DOI: https://doi.org/10.1016/S0894-9166(09)60389-X

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