Abstract
We study the effect of surface roughness on the resonance frequency of micro-cantilever sensors. The analysis demonstrates that surface roughness can enhance, decrease or even annul the effect of surface stress on the resonance frequency, depending on the surface inclination angle and the Poisson ratio of the coating film on the cantilever.
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Project supported by the National Natural Science Foundation of China (Grant Nos.10525209, 10872003 and 10932001), the Foundation for the Author of National Excellent Doctoral Dissertation of PR China (FANEDD, Grant No.2007B2), Research Fund for the New Teacher Program of the State Education Ministry of China (Grant No.200800011011) and Scientific Research Foundation for the Returned Overseas Chinese Scholars State Education Ministry of China.
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Duan, H., Xue, Y. & Yi, X. Vibration of cantilevers with rough surfaces. Acta Mech. Solida Sin. 22, 550–554 (2009). https://doi.org/10.1016/S0894-9166(09)60385-2
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DOI: https://doi.org/10.1016/S0894-9166(09)60385-2