On the Interaction Between a Quartz Crystal Resonator and an Array of Micro-Beams in Thickness-Shear Vibrations
We studied the coupled dynamic behavior of a quartz-crystal-resonator (QCR) /micro-beams system in the thickness-shear motions. Through taking into account the couple stress in the dynamic equations of the quartz plate, both continuous conditions of shear force and bending moment at the resonator/micro-beams interface are realized. Frequency shift of the compound QCR system induced by micro-beams is studied in detail. The obtained results are useful in device design and frequency-stability analysis of quartz crystal resonators.
Key Wordsquartz crystal resonator couple stress frequency shift
Unable to display preview. Download preview PDF.
- 11.McAllister, D.V., Wang, P.M., Davis, S.P., Park, J.H., Canatella, P.J., Allen, M.G. and Prausnitz, M.R., Microfabricated needles for transdermal delivery of macromolecules and nanoparticles: fabrication methods and transport studies. Proc. Natl. Acad. Sci. U.S.A., 2003, 100(24): 13755–13760.CrossRefGoogle Scholar
- 17.Gere, J.M., Mechanics of Materials (5th ed.). Pacific Grove, CA: Brooks/Cole, 2001.Google Scholar