Advertisement

Acta Mechanica Solida Sinica

, Volume 26, Issue 1, pp 99–110 | Cite as

Theoretical Investigation on the Dynamic Performance of CMUT for Design Optimization

  • Ting Yu
  • Wenchao Zhou
  • Peng Xu
  • Fengqi Yu
  • Qin Qian
Article
  • 1 Downloads

Abstract

Although many modeling approaches exist for analyzing the behavior of capacitive micro-machined ultrasonic transducers (CMUTs), the relation equation between the design parameters with input and output is still lacking. What there is can only be used to analyze the dynamic performance of CMUT indirectly and qualitatively, such as stiffness and sound pressure. A lumped-parameter theoretical model based on the dynamic theory is proposed in this paper. The relation equations between the design parameters with inputs and outputs are given. The results obtained by the proposed model agree well with those by finite element method (FEM) simulation. The dynamic and static behavior of CMUT can be clearly depicted, which is helpful for design and optimization iterations. This shows that the proposed model makes it easier to optimize the parameters of a CMUT with respect to output and bandwidth directly and to better understand the influence of each parameter.

Key words

CMUT dynamic theory finite element method 

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. [1]
    Haller,M.I. and Khuri-Yakub, B.T., A surface micromachined electrostatic ultrasonic air transducer. In: Proceedings of IEEE Ultrasonics Symposium, 1994: 1241–1244.Google Scholar
  2. [2]
    Huang, Y., Ergun, A.S., Haggstrom, E.O., Badi, M.H. and Khuri-Yakub, B.T., Fabricating capacitive micromachined ultrasonic transducers with wafer-bonding technology. IEEE Journal of Microelectromechanical Systems, 2003, 12(2): 128–137.CrossRefGoogle Scholar
  3. [3]
    Jin, X.C., Ladabaum, I., Degertekin, L., Calmes, S. and Khuri-Yakub, B.T., Fabrication and characterization of surface micromachined capacitive ultrasonic transducers. IEEE Journal of Microelectromechanical Systems, 1999, 8(1): 100–114.CrossRefGoogle Scholar
  4. [4]
    Ladabaum, I., Jin, X., Soh, H.T., Atalar, A. and Khuri-Yakub, B.T., Surface micromachined capacitive ultrasonic transducers. IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, 1998, 45(3): 678–690.CrossRefGoogle Scholar
  5. [5]
    McLean, J. and Degertekin,F., CMUTs with dual electrodes structure for improved transmit and receive performance. In: Proceedings of IEEE Ultrasonics Symposium, 2004: 501–504.Google Scholar
  6. [6]
    McIntosh, R.B., Mauger, P.E. and Patterson, S.R., Capacitive transducers with curved electrodes. IEEE Sensors Journal, 2006, 6(1): 125–138.CrossRefGoogle Scholar
  7. [7]
    Bayram,B., Yaralioglu,G., Ergun,G. and Khuri-Yakub,B.T., Influence of the electrode size and location on the performance of a CMUT. In: Proceedings of IEEE Ultrasonics Symposium, 2001: 949–952.Google Scholar
  8. [8]
    Bayram,B., Hasggström,E., Ergun,A.S., Yaralioglu,G.G. and Khuri-Yakub,B.T., Dynamic analysis of CMUTs in different regimes of operation. In: Proceeding of IEEE Ultrasonics Symposium, 2003: 481–484.Google Scholar
  9. [9]
    Bayram, B., Hggstrom, E, Yaralioglu, G.G. and Khuri-Yakub, B.T., A new regime for operating capacitive micromachined ultrasonic transducers. IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, 2003, 50(9): 1184–1190.CrossRefGoogle Scholar
  10. [10]
    Huang,Y., Hæggström,E.O., Zhuang,X., Ergun,A.S. and Khuri-Yakub,B.T., Optimized membrane configuration improves CMUT performance. In: Proceeding of IEEE Ultrasonics Symposium, 2004: 505–508.Google Scholar
  11. [11]
    Lohfink,A., Eccardt,P.C., Benecke,W. and Meixner,H., Derivation of a 1D CMUT model from FEM results for linear and nonlinear equivalent circuit simulation. In: Proceedings of IEEE Ultrasonics Symposium, 2003: 465–468.Google Scholar
  12. [12]
    Kagan Oguz,H., Olcum,S., Senlik,M.N., Atalar,A. and Koymen,H., A novel wquicalent circuit model for CMUTs. In: Proceedings of IEEE Ultrasonics Symposium, 2009: 2193–2196.Google Scholar
  13. [13]
    Rahman,M. and Chowdhury,S., A new deflection shape function for square membrane CMUT design. In: Proceedings of the IEEE Circuits and Systems, 2010: 2019–2022.Google Scholar
  14. [14]
    Buhrdorf,A., Ahrens,O. and Binder,J., Capacitive micromachined ultrasonic transducers and their applications. In: Proceedings of IEEE Ultrasonic Symposium, 2001: 933–940.Google Scholar
  15. [15]
    Caronti, A., Caliano, G. and Pappalardo, M., An accurate model for capacitive micromachined ultrasonic transducers. IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, 2002, 49(2): 159–168.CrossRefGoogle Scholar
  16. [16]
    Lohfink, A. and Eccardt, P., Linear and nonlinear equivalent circuit modeling of CMUTs. IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, 2005, 52(12): 2163–2172.CrossRefGoogle Scholar
  17. [17]
    Vogl, G.W. and Nayfeh, A.H., A reduced-order model for electrically actuated clamped circular plates. Journal of Micromechanics and Microengineering, 2005, 15(4): 684–690.CrossRefGoogle Scholar
  18. [18]
    Bozkurt, A., Ladabaum, I., Atalar, A. and Khuri-Yakub, B.T., Theory and analysis of electrode size optimization for capacitive microfabricated ultrasonic transducers. IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, 1999, 46(6): 1364–1374.CrossRefGoogle Scholar
  19. [19]
    Huang, Y., Capacitive Micromachined Ultrasonic Transducers (CMUTs) Built with Wafer-Bonding Technology. Ph.D. dissertation, Stanford University, USA, 2005.Google Scholar

Copyright information

© The Chinese Society of Theoretical and Applied Mechanics and Technology 2013

Authors and Affiliations

  • Ting Yu
    • 1
    • 2
  • Wenchao Zhou
    • 1
    • 2
  • Peng Xu
    • 1
    • 2
    • 3
  • Fengqi Yu
    • 1
    • 2
  • Qin Qian
    • 3
  1. 1.Department of Integrated ElectronicsShenzhen Institute of Advanced Technology, Chinese Academy of SciencesShenzhenChina
  2. 2.The Chinese University of Hong KongHong KongChina
  3. 3.School of Civil Engineering and MechanicsHuazhong University of Sciences and TechnologyWuhanChina

Personalised recommendations