Thermoelastic Damping in a Micro-Beam Resonator Tunable with Piezoelectric Layers
In this paper, thermoelastic damping (TED) in a micro-beam resonator with a pair of piezoelectric layers bonded on its upper and lower surfaces is investigated. Equation of motion is derived and the thermoelasticity equation is governed using two dimensional non-Fourier heat conduction model based on continuum theory frame. Applying Galerkin discretization method and complex-frequency approach to solve the equations of coupled thermoelasticity, we study TED of a clamped-clamped micro-beam resonator. The presented results demonstrate that thickness of the piezoelectric layers and application of DC voltage to them can affect the TED ratio and the critical thickness value of the resonator.
Key wordsMEMS thermoelastic damping piezoelectric resonator non-Fourier heat conduction
Unable to display preview. Download preview PDF.
- Severine, L., Stochastic Finite Element Method for the Modeling of Thermoelastic Damping in Micro-Resonators. Ph.D. Dissertation, University of Liege, Department of Aerospace and Mechanics, 2006.Google Scholar
- Roszhart, R.V., The effect of thermoelastic internal friction on the Q of the micromachined silicon resonators. In: Prog. of IEEE Solid State Sensor and Actuator Workshop, Hilton Head Island, SC, USA, June 1990, 13–16.Google Scholar
- Sadd, M.H., Elasticity, Theory, Applications, and Numerics. Academic Press, 2nd edition, 2009.Google Scholar
- Kunadian, L., McDonough, J.M. and Tagavi, K.A. Numerical simulation of heat transfer mechanisms during femtosecond laser heating of nano-films using 3D dual phase lag model. In: Proceeding of HTFED04, ASME Heat Transfer/Fluid Engineering Summer Conference Charlotte, North Carolina, USA, 2004.Google Scholar
- Thomson, W.L. and Dahleh, M.D., Theory of Vibrations with Applications. Prentice Hall, 5th edition, 1998.Google Scholar