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Acta Mechanica Solida Sinica

, Volume 23, Issue 1, pp 1–12 | Cite as

Surface-enhanced cantilever sensors with nano-porous films

  • Huiling Duan
Article

Abstract

Developing surface-enhanced microcantilevers with improved sensitivities is of longstanding interest. In this paper, the design of surface-enhanced cantilever sensors using nano-(micro-) porous films as surface layers is proposed. The static deformation and resonance frequencies of these surface-enhanced sensors with the simultaneous effects of the eigenstrain, the surface stress and the adsorption mass are analyzed. It is shown that the sensitivities of these novel cantilever sensors for the static deformation and resonance frequencies can be tuned by the porosity, the size of the pores and the structure of the porous films. For the three kinds of cantilever consisting of solid films, films with aligned cylindrical micro-scale pores, and those with nano-scale pores, the nano-porous one has the highest static and dynamic sensitivities, whereas the solid one has the lowest.

Key words

cantilever sensors nano- (micro-) porous films surface stress curvature resonance frequency 

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References

  1. [1]
    Stoney, G.G., The tension of metallic films deposited by electrolysis. Proceedings of the Royal Society of London Series A — Containing Papers of a Mathematical and Physical Character, 1909, 82(553): 172–175.CrossRefGoogle Scholar
  2. [2]
    Freund, L.B., Some elementary connections between curvature and mismatch strain in compositionally graded thin films. Journal of the Mechanics and Physics of Solids, 1996, 44(5): 723–736.CrossRefGoogle Scholar
  3. [3]
    Li, X., Shih, W.Y., Aksay, I.A. and Shih, W.-H., Electromechanical behavior of PZT-brass unimorphs. Journal of the American Ceramic Society, 1999, 82(7): 1733–1740.CrossRefGoogle Scholar
  4. [4]
    Zhang, Y. and Zhao, Y.P., Static study of cantilever beamstiction under electrostaticforce influence. Acta Mechanica Solida Sinica, 2004, 17(2): 104–112.Google Scholar
  5. [5]
    Zang, J., Huang, M. and Liu, F., Mechanism for nanotube formation from self-bending nanofilms driven by atomic-scale surface-stress imbalance. Physical Review Letters, 2007, 98(14): 146102–1–4.CrossRefGoogle Scholar
  6. [6]
    Ilic, B., Czaplewski, D., Craighead, H.G., Neuzil, P., Campagnolo, C. and Batt, C., Mechanical resonant immunospecific biological detector. Applied Physics Letters, 2000, 77(3): 450–452.CrossRefGoogle Scholar
  7. [7]
    Chun, D.W., Hwang, K.S., Eom, K., Lee, J.H., Cha, B.H., Lee, W.Y., Yoon, D.S. and Kim, T.S., Detection of the Au thin-layer in the Hz per picogram regime based on the microcantilevers. Sensors and Actuators A — Physical, 2007, 135(2): 857–862.CrossRefGoogle Scholar
  8. [8]
    Saya, D., Nicu, L., Guirardel, M., Tauran, Y. and Bergaud, C., Mechanical effect of gold nanoparticles labeling used for biochemical sensor applications: A multimode analysis by means of SiNx micromechanical cantilever and bridge mass detectors. Review of Scientific Instruments, 2004, 75(9): 3010–3015.CrossRefGoogle Scholar
  9. [9]
    Gurtin, M.E., Markenscoff, X. and Thurston, R.N., Effect of surface stress on the natural frequency of thin crystals. Applied Physics Letters, 1976, 29(9): 529–530.CrossRefGoogle Scholar
  10. [10]
    Lachut, M.J. and Sader, J.E., Effect of surface stress on the stiffness of cantilever plates. Physical Review Letters, 2007, 99(20), 206102–1–4.CrossRefGoogle Scholar
  11. [11]
    Gurtin, M.E. and Murdoch, A.I., A continuum theory of elastic material surfaces. Archive for Rational Mechanics and Analysis, 1975, 57(4): 291–323.MathSciNetCrossRefGoogle Scholar
  12. [12]
    Gurtin, M.E., Weissmüller, J. and Larché, F., A general theory of curved deformable interfaces in solids at equilibrium. Philosophical Magazine A — Physics of Condensed Matter Structure Defects and Mechanical Properties, 1998, 78(5): 1093–1109.Google Scholar
  13. [13]
    Berger, R., Delamarche, E., Lang, H.P., Gerber, C., Gimzewski, J.K., Meyer, E. and Güntherodt, H.-J., Surface stress in the self-assembly of alkanethiols on gold. Science, 1997, 276(5321): 2021–2024.CrossRefGoogle Scholar
  14. [14]
    Chakarova-Käck, S.D., Schröder, E., Lundqvist, B.I. and Langreth, D.C., Application of van der Waals density functional to an extended system: Adsorption of benzene and naphthalene on graphite. Physical Review Letters, 2006, 96(14): 146107–1–4.CrossRefGoogle Scholar
  15. [15]
    Grossmann, A., Erley, W., Hannon, J.B. and Ibach, H., Giant surface stress in heteroepitaxial films: Invalidation of a classical rule in epitaxy. Physical Review Letters, 1996, 77(1), 127–130.CrossRefGoogle Scholar
  16. [16]
    Sony, P., Puschnig, P., Nabok, D. and Ambrosch-Draxl, C., Importance of van der Waals interaction for organic molecule-metal junctions: Adsorption of thiophene on Cu(110) as aprototype. Physical Review Letters, 2007, 99(17): 176401–1–4.CrossRefGoogle Scholar
  17. [17]
    Zhang, N.H., Shan, J.Y. and Xing, J.J., Piezoelectric properties of single-strand DNA molecular brush bio-layers. Acta Mechanica Solida Sinica, 2007, 20(3): 206–210.CrossRefGoogle Scholar
  18. [18]
    Zhang, J.Q., Yu, S.W. and Feng, X.Q., Theoretical analysis of resonance frequency change induced by adsorption. Journal of Physics D — Applied Physics, 2008, 41(12): 125306–1–8.CrossRefGoogle Scholar
  19. [19]
    Zhang, N.H. and Shan, J.Y., An energy model for nanomechanical deflection of cantilever-DNA chip. Journal of the Mechanics and Physics of Solids, 2008, 56(6): 2328–2337.CrossRefGoogle Scholar
  20. [20]
    Weissmüller, J., Viswanath, R.N., Kramer, D., Zimmer, P., Würschum, R. and Gleiter, H., Charge-induced reversible strain in a metal. Science, 2003, 300(5617): 312–315.CrossRefGoogle Scholar
  21. [21]
    Kramer, D., Viswanath, R.N. and Weissmüller, J., Surface-stress induced macroscopic bending of nanoporous gold cantilevers. Nano Letters, 2004, 4(5): 793–796.CrossRefGoogle Scholar
  22. [22]
    Chen, G.Y., Thundat, T., Wachter, E.A. and Warmack, R.J., Adsorption-induced surface stress and its effects on resonance frequency of microcantilevers. Journal of Applied Physics, 1995, 77(8): 3618–3622.CrossRefGoogle Scholar
  23. [23]
    McFarland, A.W., Poggi, M.A., Doyle, M.J., Bottomley, L.A. and Colton, J.S., Influence of surface stress on the resonance behavior of microcantilevers. Applied Physics Letters, 2005, 87(5): 053505–1–3.CrossRefGoogle Scholar
  24. [24]
    Hwang, K.S., Eom, K., Lee, J.H., Chun, D.W., Cha, B.H., Yoon, D.S., Kim, T.S. and Park, J.H., Dominant surface stress driven by biomolecular interactions in the dynamical response of nanomechanical microcantilevers. Applied Physics Letters, 2006, 89(17): 173905–1–3.CrossRefGoogle Scholar
  25. [25]
    Duan, H.L., Wang, J., Huang, Z.P. and Karihaloo, B.L., Size-dependent effective elastic constants of solids containing nano-inhomogeneities with interface stress. Journal of the Mechanics and Physics of Solids, 2005, 53(7): 1574–1596.MathSciNetCrossRefGoogle Scholar
  26. [26]
    Duan, H.L., Wang, J., Karihaloo, B.L. and Huang, Z.P., Nanoporous materials can be made stiffer than non-porous counterparts by surface modification. Acta Materialia, 2006, 54(11): 2983–2990.CrossRefGoogle Scholar
  27. [27]
    He, L.H., Self-strain of solids with spherical nanovoids. Applied Physics Letters, 2006, 88(15): 151909–1–3.CrossRefGoogle Scholar
  28. [28]
    Sharma, P., Ganti, S. and Bhate, N., Effect of surfaces on the size-dependent elastic state of nano-inhomogeneities. Applied Physics Letters, 2003, 82(4): 535–537.CrossRefGoogle Scholar
  29. [29]
    Weissmüller, J. and Cahn, J.W., Mean stresses in microstructures due to interface stresses: A generalization of a capillary equation for solids. Acta Materialia, 1997, 45(5): 1899–1906.CrossRefGoogle Scholar
  30. [30]
    Torquato, S., Effective stiffness tensor of composite media: II — Applications to isotropic dispersions. Journal of the Mechanics and Physics of Solids, 1998, 46(8): 1411–1440.MathSciNetCrossRefGoogle Scholar
  31. [31]
    Shenoy, V.B., Atomistic calculations of elastic properties of metallic fcc crystal surfaces. Physical Review B, 2005, 71(9): 094104–1–11.CrossRefGoogle Scholar

Copyright information

© The Chinese Society of Theoretical and Applied Mechanics and Technology 2010

Authors and Affiliations

  1. 1.State Key Laboratory for Turbulence and Complex System, CAPT and Department of Mechanics and Aerospace Engineering, College of EngineeringPeking UniversityBeijingChina

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