Quantitation of major elements with secondary ion mass spectrometry by using M 2 + -molecular ions

  • Johan Vlekken
  • Ting-Di Wu
  • Marc D’Olieslaeger
  • Gilbert Knuyt
  • Wilfried Vandervorst
  • Luc De Schepper
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Abstract

A new quantitation method, based on the detection of M 2 + molecular ions, is presented. It has been shown that M 2 + molecular ions are formed by a recombination process between independently sputtered M and M+ particles. Based on this formation mechanism, it will be demonstrated that M 2 + molecular ions can be used to quantitate major elements. The method will be used for quantitation of an Al x Ga1−x As multilayer. Furthermore, it will be shown that some matrix effects can be explained by the energy dependence of instrument transmission.

Keywords

Major Element Transmission Efficiency Pair Combination Relative Transmission Metal Organic Vapor Phase Epitaxy 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.
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Copyright information

© American Society for Mass Spectrometry 1998

Authors and Affiliations

  • Johan Vlekken
    • 1
  • Ting-Di Wu
    • 1
  • Marc D’Olieslaeger
    • 1
  • Gilbert Knuyt
    • 1
  • Wilfried Vandervorst
    • 2
  • Luc De Schepper
    • 1
  1. 1.Institute for Materials Research, Materials Physics DivisionLimburgs Universitair CentrumDiepenbeekBelgium
  2. 2.IMEC v.z.w.Kapeldreef, LeuvenBelgium

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