Abstract
Compression glass molding is a promising technique for mass production of near net-shaped, high-precision, and low-cost optical glass elements. However, the glass molding process causes the damage of glass and the mold during demolding because of the chemical or physical adhesion of the glass to the mold. To overcome this limitation, graphite molds are used owing to their good lubrication and easy machining. However, graphite materials show rapid oxidation at high temperatures in the presence of oxygen. Therefore, in this study, a thin SiC coating layer was deposited on the graphite mold using the chemical vapor deposition (CVD) method to utilize the lubrication properties of graphite and the anti-oxidation properties of SiC. The specimen obtained using the low-temperature CVD method showed high carbon content and good lubrication properties than that obtained using the high-temperature CVD method.
Similar content being viewed by others
References
K.J. Ma, H.H. Chien, W.H. Chuan, C.L. Chao, K.C. Hwang, Design of protective coatings for glass lens molding. Key Eng. Mater. 364–366, 655–661 (2008)
J. Brand, R. Gadow, A. Killinger, Application of diamond-like carbon coatings on steel tools in the production of precision glass components. Surf. Coat. Tech. 180–181, 213–217 (2004)
D. Zhong, E. Mateeva, I. Dahan, J.J. Moore, G.G.W. Mustoe, T. Ohno, J. Disam, S. Thiel, Wettability of NiAl, Ni–Al–N, Ti–B-C, and Ti–B–C–N films by glass at high temperatures. Surf. Coat. Tech. 133–134, 8–14 (2004)
K.J. Kim, K.Y. Cho, Y.C. Park, T.K. Kim, Y.J. Chung, Y.S. Lim, Improvement of oxidation-resistance of graphite by phosphate. J. Korean Ceram. Soc. 36(5), 555–563 (1999)
K.L. Luthra, Oxidation of carbon/carbon composites—a theoretical analysis. Carbon 26(1), 217–224 (1988)
H. Hatta, T. Aoi, I. Kawahara, Y. Kogo, Tensile Strength of Carbon-Carbon Composites: II—effect of Heat Treatment Temperature. J. Compos. Mater. 38(19), 1685–1699 (2004)
C.A.A. Cairo, M.L.A. Graça, C.R.M. Silva, J.C. Bressiani, Functionally gradient ceramic coating for carbon-carbon antioxidation protection. J. Eur. Ceram. Soc. 21(3), 325–329 (2001)
L.F. Cheng, Y. Xu, L. Zhang, X. Yin, Preparation of an oxidation protection coating for c/c composites by low pressure chemical vapor deposition. Carbon 38(10), 1493–1498 (2000)
L. Snell, A. Nelson, P. Molian, A novel laser technique for oxidation-resistant coating of carbon–carbon composite. Carbon 39(7), 991–999 (2001)
D. Kim, W.-J. Kim, J.-E. Jang, S.G. Yoon, D.-J. Kim, J.Y. Park, Oxidation of CVD β-SiC in impurity-controlled helium environment at 950 °C. J. Korean Ceram. Soc. 48(5), 426–432 (2011)
K.D. Fischbach, K. Georgiadis, F. Wang, O. Dambon, F. Klocke, Y. Chen, A.Y. Yi, Investigation of the effects of process parameters on the glass-to-mold sticking force during precision glass molding. Surf. Coat. Tech. 205(2), 312–319 (2010)
C.W. Bale, P. Chartrand, S.A. Degterov, G. Eriksson, K. Hack, R.B. Mahfoud, J. Melancqon, A.D. Pelton, S. Petersen, FactSage thermochemical software and databases. Calphad 26(2), 189–228 (2002)
J.G. Kim, Y.Y. Choi, D.J. Choi, J.I. Kim, B.S. Kim, S.M. Choi, A study on the thermoelectric properties of chemical vapor deposited SiC films with temperature and diluent gases variation. J. Ceram. Soc. Jpn. 117(1365), 574–577 (2009)
A.Y. Yi, A. Jain, Compression molding of aspherical glass lenses–a combined experimental and numerical analysis. J. Am. Ceram. Soc. 88(3), 579–586 (2005)
V.V. Pujar, J.D. Cawley, Effect of STACKING faults on the X-ray diffraction profiles of β-SiC powders. J. Am. Ceram. Soc. 78(3), 774–782 (1995)
G. Nogay, E. Özkol, S. Ilday, R. Turan, Structural peculiarities and aging effect in hydrogenated a-Si prepared by inductively coupled plasma assisted chemical vapor deposition technique. Vacuum 110, 114–120 (2014)
E.P. Plueddemann, Silane Coupling Agents (Springer, Boston, 1982), pp. 111–139
W.Y. Lee, X-ray photoelectron spectroscopy and Auger electron spectroscopy studies of glow discharge Si1 − xCx: H films. J. Appl. Phys. 51, 3365–3372 (1980)
W.K. Choi, F.L. Loo, C.H. Ling, F.C. Loh, K.L. Tan, Structural and electrical studies of radio frequency sputtered hydrogenated amorphous silicon carbide films. J. Appl. Phys. 78(2), 7289–7294 (1995)
H. Yan, R.W.M. Kwok, S.P. Wong, XPS studies on SiC thin layers formed by ion implantation with a metal vapor vacuum arc ion source. Appl. Surf. Sci. 92, 61–66 (1996)
S. Contarini, S.P. Howlett, C. Rizzo, B.A.D. Angelis, XPS study on the dispersion of carbon additives in silicon carbide powders. Appl. Surf. Sci. 51(3-4), 177–183 (1991)
B.P. Swain, The analysis of carbon bonding environment in HWCVD deposited a-SiC: H films by XPS and Raman spectroscopy. Surf. Coat. Tech. 201(3-4), 1589–1593 (2006)
Acknowledgements
This work was supported by the Technology Innovation Program (No. 10053062) funded by the Ministry of Trade, Industry & Energy (MI, Korea).
Author information
Authors and Affiliations
Corresponding author
Additional information
Publisher's Note
Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations.
Rights and permissions
About this article
Cite this article
Kim, KH., Hwang, KJ., Lee, H. et al. Improvement of adhesion properties of glass prepared using SiC-deposited graphite mold via low-temperature chemical vapor deposition. J. Korean Ceram. Soc. 57, 112–118 (2020). https://doi.org/10.1007/s43207-019-00010-2
Received:
Revised:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s43207-019-00010-2